Electrically Tunable Graphene Gas Sensors

电可调石墨烯气体传感器

• 批准号: 1711227
• 负责人: Liwei Lin
• 金额: $ 33万
• 依托单位: University of California-Berkeley
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2017
• 资助国家: 美国
• 起止时间: 2017-06-15 至 2020-05-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=1711227&HistoricalAwards=false
• 关键词: Electrically; Tunable; Graphene; Gas; Sensors

In the modern age of sensing technologies for broad applications such as internet of things, the capability to make low power, small form factor, and versatile gas sensors for applications such as wearable devices and cell phones could revolutionize the fields of gas sensing systems and fabrications. Over the past decade, a great number of miniaturized physical sensors, such as light, motion, heart rate, and altitude have been successfully developed for mobile devices to deliver reliable sensing tasks and revolutionize the user experiences. The potential future growth area has been predicted to be the chemical interfaces to sense surrounding environmental conditions, such as gases, biomarkers, and explosives. Specifically, chemical sensors are projected to have a 32% share of the total mobile sensor market in the next decade. For example, gas sensors may monitor critical volatile chemicals (CO, VOC etc.) to determine living conditions from comfort to health threatening and even the possibilities of diagnosing lung related diseases by analyzing exhaled gases from human breath. The proposed project provides unique opportunities by using graphene as the new gas sensing material; electrical turning mechanisms for gas selectivity and responses; and a wafer-level processing platform for low manufacturing cost.In recent years, graphene based gas sensors have drawn great interests due to its ultra large surface to volume ratio and semiconducting properties. Both room temperature and molecular-level sensing capabilities have been reported, while the gas selectivity is poor without further functionalization with polymers or noble metal particles. This project proposes four unique approaches to address the typical issues associated with electrochemical gas sensors: (1) low power consumption by demonstrating room temperature gas sensing capability using ultrasensitive single-layer graphene as the sensing materials; (2) gas selectivity by graphene FETs (Field Effect Transistors) coupled with DC electrical tuning without adding functional materials; (3) fast responses and drift-free sensing by using AC electrical phase sensing; and (4) wafer-level batch fabrication for small form factor and low manufacturing cost. By utilizing the architecture of an array of graphene FET gas sensors and the development of wafer-level process to integrate the sensor with microelectronics to reduce device size and manufacturing cost, this project aims to result in ultra-low power, low form-factor gas sensors with good sensitivity, stability, response time and gas selectivity all desirable features for current and future mobile gas sensing applications in wearable devices and cell phones. Furthermore, this project also seeks to answer some of the very fundamental questions: How does the electron transferred from graphene surface to adsorbed gas molecules during the sensing process? What are the fundamental limitations in gas selectivity of graphene FET gas sensor arrays? Can one make graphene FET gas sensors to maintain good selectivity at a wide concentration range (for example from 1ppm to 50%) with good reproducibility?

在现代传感技术的广泛应用中，例如物联网，为可穿戴设备和手机等应用的低功率，小型外形和多功能气体传感器的能力可能彻底改变气体传感系统和制造的领域。 在过去的十年中，已成功开发了许多微型物理传感器，例如光，运动，心率和高度，用于移动设备，以交付可靠的传感任务并彻底改变了用户体验。 预计潜在的未来增长区域将是感知环境条件（例如气体，生物标志物和炸药）的化学界面。 具体而言，预计化学传感器将在未来十年的移动传感器市场中拥有32％的份额。 例如，气体传感器可能会监视关键的挥发性化学物质（CO，VOC等），以确定从舒适到健康的生活条件，甚至通过分析人类呼吸中呼出的气体来诊断肺部相关疾病的可能性。 拟议的项目通过将石墨烯作为新的气体传感材料提供了独特的机会。气体选择性和反应的电气转弯机制；以及一个用于低生产成本的晶圆级处理平台。近年来，由于其超大的表面与体积比和半导体特性，基于石墨烯的气体传感器引起了极大的兴趣。 据报道，室温和分子水平的传感能力都较差，而气体的选择性则很差，而没有与聚合物或高贵金属颗粒进行进一步官能化。 该项目提出了四种独特的方法来解决与电化学气体传感器相关的典型问题：（1）通过使用超敏感的单层石墨烯作为感应材料，通过证明室温气体传感能力低功耗； （2）石墨烯FET（现场效应晶体管）的气体选择性与直流电调，而无需添加功能材料； （3）通过使用AC电相传感进行快速响应和无漂移感测； （4）晶状体批量制造，用于较小的形状和低制造成本。 通过利用一系列石墨烯FET气体传感器的体系结构以及晶圆级工艺的开发，将传感器与微电子设备集成在一起，以降低设备尺寸和制造成本，该项目旨在使超低功率，低形式的气体传感器与良好的敏感性，稳定性，响应时间，响应时间，响应时间和可用于当前的型号且可用于当前的移动性且可用于良好的型号以及可用于当前的移动型的启发性。 此外，该项目还试图回答一些非常基本的问题：在感应过程中，电子如何从石墨烯表面转移到吸附的气体分子？ 石墨烯FET气体传感器阵列的气体选择性的基本限制是什么？ 可以使石墨烯FET气体传感器保持良好的浓度范围（例如从1ppm到50％）保持良好的选择性吗？

项目成果

Defect-Induced Gas Adsorption on Graphene Transistors

• DOI: 10.1002/admi.201701640
• 发表时间: 2018-05-09
• 期刊: ADVANCED MATERIALS INTERFACES
• 影响因子: 5.4
• 作者: Liu, Yumeng;Liu, Huiliang;Lin, Liwei
• 通讯作者: Lin, Liwei

A review on chemiresistive room temperature gas sensors based on metal oxide nanostructures, graphene and 2D transition metal dichalcogenides

• DOI: 10.1007/s00604-018-2750-5
• 发表时间: 2018-04-01
• 期刊: MICROCHIMICA ACTA
• 影响因子: 5.7
• 作者: Joshi, Nirav;Hayasaka, Takeshi;Lin, Liwei
• 通讯作者: Lin, Liwei

AC phase sensing of graphene FETs for chemical vapors with fast recovery and minimal baseline drift

• DOI: 10.1016/j.snb.2018.01.244
• 发表时间: 2018-06
• 期刊: Sensors and Actuators B: Chemical
• 作者: Huiliang Liu;Yumeng Liu;Yao Chu;Takeshi Hayasaka;Nirav Joshi;Yong Cui;Xiaohao Wang;Zheng You;Liwei Lin

The influences of temperature, humidity, and O2 on electrical properties of graphene FETs

• DOI: 10.1016/j.snb.2019.01.037
• 发表时间: 2019-04-15
• 期刊: SENSORS AND ACTUATORS B-CHEMICAL
• 影响因子: 8.4
• 作者: Hayasaka, Takeshi;Kubota, Yoshihiro;Lin, Liwei
• 通讯作者: Lin, Liwei