Electrosynthesized Nanocomposite for Microelectromechanical Systems

用于微机电系统的电合成纳米复合材料

• 批准号: 0401356
• 负责人: Liwei Lin
• 金额: $ 21万
• 依托单位: University of California-Berkeley
• 依托单位国家: 美国
• 项目类别: Continuing Grant
• 财政年份: 2004
• 资助国家: 美国
• 起止时间: 2004-10-01 至 2007-09-30
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0401356&HistoricalAwards=false
• 关键词: Electrosynthesized; Nanocomposite; Microelectromechanical; Systems

The objective of this research is to investigate the combination of two or more materials in the form of nanocomposite in making microstructures for Microelectromechanical Systems applications. The first research task focuses on metal-organic/inorganic nanocomposites by adding nanoparticles into microstructures in order to modify and strengthen the material properties and alleviate the mechanical deficiency such as fatigue and aging with the advantage of low temperature processing and feasibility for direct integration with microelectronics. The architecture of these microstructures is based on suspended mechanical microstructures made of nanocomposite for micro actuators or sensors such as inertial sensors applications. The second research task aims to study conductive-polymer based nanocomposite made by encapsulating nano substances such as chemicals, enzymes, or biomarkers into microstructures for biosensor applications. The architecture is based on the micro-gap structures that will be filled with conductive nanocomposite with in situ encapsulated nanoparticles such as enzymes for bio-sensing applications. Electrosynthesized nanocomposite will create a wide range of novel sensor applications for Microelectromechanical systems such as high frequency mechanical resonators that perform as precision filters in wireless communication systems, and disposable glucose sensors that assist daily life of diabetic patients. For industry, this research will provide potential industrial applications with (a) advanced manufacturing capability of nanocomposite for microstructures and (b) new ways to interact with micro systems using nanocomposite integrated with microelectronics. For the academic world, results of the proposed research will open a new area in nanocomposite-based design, manufacturing and applications.

这项研究的目的是研究以纳米复合材料形式的两种或多种材料的组合，以制造微型机械系统应用的微观结构。 第一个研究任务的重点是金属/有机纳米复合材料，通过将纳米颗粒添加到微结构中，以修改和增强材料特性，并减轻机械缺陷，例如疲劳和衰老，从而使低温处理的优势以及与微电脑直接整合的低温处理和可行性。 这些微观结构的结构基于由纳米复合材料制成的悬浮机械微结构，用于微执行器或传感器，例如惯性传感器的应用。 第二项研究任务旨在研究通过将纳米物质（例如化学物质，酶或生物标志物）封装成生物传感器应用微结构的纳米物质而制成的。 该体系结构基于微间隙结构，这些结构将充满导电纳米复合材料，并带有原位封装的纳米颗粒，例如用于生物感应应用的酶。 电气合成的纳米复合材料将为微机械系统创建广泛的新型传感器应用，例如在无线通信系统中用作精确过滤器的高频机械谐振器，以及可支配的葡萄糖传感器，以帮助糖尿病患者的日常生活。 对于行业而言，这项研究将提供潜在的工业应用，以（a）用于微观结构的纳米复合材料的高级制造能力，以及（b）使用与微电子学集成的纳米复合材料与微型系统进行交互的新方法。 对于学术界，拟议的研究结果将在基于纳米复合材料的设计，制造和应用中开放一个新领域。