Direct Synthesis, Assembly and Integration of Graphene via Micro CVD

通过微 CVD 直接合成、组装和集成石墨烯

• 批准号: 1031749
• 负责人: Liwei Lin
• 金额: $ 38.91万
• 依托单位: University of California-Berkeley
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2010
• 资助国家: 美国
• 起止时间: 2010-09-01 至 2014-08-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=1031749&HistoricalAwards=false
• 关键词: Direct; Synthesis; Assembly; Integration; Graphene

The objective of this research is to develop the synthesis, assembly and integration process for graphene by means of local chemical vapor deposition. Graphene, a two-dimensional nanostructure, could form a highly sensitive transduction system when integrated with microelectronics to possess the capabilities of signal transduction, processing, control and communication. This project utilizes micro structure as the heating platform instead of conventional furnace for on-chip integration of graphene. This approach offers flexibility in ultrafast cooling control to produce graphene with good quality and uniformity. Furthermore, local heating enables the direct integration of graphene with microelectronics in a room temperature chamber while allowing high temperature processes in selective local areas. Placement, synthesis, assembly and integration of graphene can be well-controlled to enable graphene-based sensing systems. This project will investigate and characterize graphene synthesis mechanisms by the local chemical vapor deposition process, including process protocols, heat and mass transfer processes, design and fabrication of microstructures, property and uniformity of synthesized graphene, and system-level integration with microelectronics. The capability of direct synthesis, assembly and integration of graphene with on-chip microelectronics could have a profound impact in various application areas, including advanced manufacturing capabilities for graphene-based sensors. It will benefit the general Microelectromechanical Systems community to inspire nano device development beyond graphene, such as nanowires and nanotubes-based integrated sensors. The synergy of research and education interaction and integration between manufacturing, material sciences and physical transduction principles will be an engine for the multidisciplinary fusion in research/education expertise for the next-generation scientists and engineers.

这项研究的目的是通过局部化学蒸气沉积来开发石墨烯的合成，组装和整合过程。 石墨烯是一种二维纳米结构，与微电子集成以具有信号转导，处理，控制和通信的能力时，可以形成高度敏感的转导系统。 该项目利用微型结构作为加热平台，而不是传统的炉子来进行石墨烯的芯片整合。 这种方法在超快冷却控制方面具有灵活性，可生产具有良好质量和均匀性的石墨烯。 此外，局部加热可以使石墨烯与室温室中的微电子直接整合，同时允许选择性当地的高温过程。 石墨烯的放置，合成，组装和集成可以很好地控制以启用基于石墨烯的传感系统。 该项目将通过局部化学蒸气沉积过程进行调查并表征石墨烯合成机制，包括过程方案，热量和传质过程，微结构的设计和制造，合成石墨烯的特性和均匀性以及与微电机的系统级集成。 直接合成，组装和将石墨烯与芯片微电子元素集成的能力可能会对各种应用领域产生深远的影响，包括基于石墨烯的传感器的高级制造能力。 它将有益于一般的微机械系统社区，以激发石墨烯之外的纳米设备开发，例如纳米线和基于纳米管的集成传感器。 研究和教育互动的协同作用以及制造业，物质科学和物理转导原则之间的整合将是下一代科学家和工程师研究/教育专业知识的多学科融合的引擎。