Exploratory Synthesis and Reactivity of Volatile Transition Metal Complexes and Use as Molecular Precursors

挥发性过渡金属配合物的探索性合成和反应性以及作为分子前体的用途

基本信息

批准号：
1954745
负责人：
Gregory Girolami
金额：
$ 49.5万
依托单位：
University of Illinois at Urbana-Champaign
依托单位国家：
美国
项目类别：
Standard Grant
财政年份：
2020
资助国家：
美国
起止时间：
2020-05-15 至 2024-04-30
项目状态：
已结题

来源：
https://www.nsf.gov/awardsearch/showAward?AWD_ID=1954745&HistoricalAwards=false
关键词：
Exploratory Synthesis Reactivity Volatile Transition

项目摘要

Chemical vapor deposition (CVD) is a method to produce high quality, high-performance solid materials. For example, CVD is used by the semiconductor industry to form thin films of a variety of substances that are necessary for the functioning of many electronic devices. Since there is pervasive need for new types of films, there is a continuing demand for new compounds that can be used in CVD. To meet this need, Professor Gregory S. Girolami of the University of Illinois at Urbana-Champaign is supported by the Chemical Synthesis Program of the Chemistry Division of the National Science Foundation to develop new compounds that can be used to form films of metals and metal oxides. Metal compounds that become vapors when heated are prepared and their decomposition on heated surfaces evaluated. The goal is to design better ways to deposit the wires and insulators that are components of computer chips. The work involves cooperation between Professor Girolami’s research group and microelectronic companies, IBM and Intel. The project contributes to the education and training of a diverse group of undergraduate and graduate students. In addition Professor Girolami writes short radio spots (TinyTech) highlighting recent scientific advances of interest to the public. The development of new and better molecular precursors for the chemical vapor deposition (CVD) of thin films is a continuing need. This project prepares new volatile compounds of the transition metals, investigates their chemical reactivities, and utilities them as thin film precursors. Some of the objectives are the synthesis and characterization of complexes containing coordinating groups that bind to metals through oxygen, nitrogen, or boron-hydrogen bonds. Upon their synthesis, the new compounds are evaluated for the CVD preparations of thin films. A diverse group of undergraduate and graduate students are involved in the project that lies at the interface of inorganic and materials chemistry. Outreach activities involving the production and broadcast of TinyTech radio spots.This award reflects NSF's statutory mission and has been deemed worthy of support through evaluation using the Foundation's intellectual merit and broader impacts review criteria.

化学蒸气沉积（CVD）是一种生产高质量，高性能固体材料的方法。例如，半导体行业使用CVD来形成许多电子设备功能所需的各种物质的薄膜。由于对新类型的电影存在广泛的需求，因此可以在CVD中使用的新化合物的持续需求。为了满足这一需求，伊利诺伊大学Urbana-Champaign大学的Gregory S. Girolami教授得到了国家科学基金会化学委员会的化学合成计划的支持，该计划可以开发新化合物，这些化合物可用于形成金属和金属氧化物的膜。制备加热时变为蒸气的金属化合物，并评估了它们在加热表面上的分解。目的是设计更好的方法来存放电线和绝缘体，这些电线和绝缘子是计算机芯片的组件。这项工作涉及Girolamia教授研究小组与微电子公司IBM和Intel之间的合作。该项目有助于对本科生和研究生的潜水员组的教育和培训。此外，Girolamia教授还写了简短的广播点（TinyTech），强调了最近对公众感兴趣的科学进步。薄膜化学蒸气沉积（CVD）的新分子前体的开发是持续的需求。该项目准备了过渡金属的新挥发性化合物，研究其化学反应性，并将其作为薄膜前体的实用性。某些目标是通过氧，氮或硼 - 氢键结合的配位基团的复合物的合成和表征。在合成后，对新化合物进行了薄膜的CVD制剂的评估。该项目包括在无机和材料化学界面的项目中。涉及TinyTech无线电点的生产和广播的外展活动。该奖项反映了NSF的法定任务，并通过使用基金会的知识分子优点和更广泛的影响审查标准来评估被认为是宝贵的支持。

项目成果

期刊论文数量（14）

专著数量（0）

科研奖励数量（0）

会议论文数量（0）

专利数量（0）

Sodium Aminodiboranates Na(H 3 BNR 2 BH 3 ): Structural and Spectroscopic Studies of Steric and Electronic Substituent Effects

氨基二硼酸钠 Na(H 3 BNR 2 BH 3 )：空间和电子取代基效应的结构和光谱研究

DOI：
10.1021/acs.inorgchem.2c01997
发表时间：
2022
期刊：
Inorganic Chemistry
影响因子：
4.6
作者：
Caroff, Christopher M.;Bellott, Brian J.;Daly, Connor I.;Daly, Scott R.;Dunbar, Andrew C.;Mallek, Justin L.;Nesbit, Mark A.;Girolami, Gregory S.
通讯作者：
Girolami, Gregory S.

Selective chemical vapor deposition of HfB 2 on Al 2 O 3 over SiO 2 and the acceleration of nucleation on SiO 2 by pretreatment with Hf[N(CH 3 ) 2 ] 4

SiO 2 上Al 2 O 3 选择性化学气相沉积HfB 2 及Hf[N(CH 3 ) 2 ] 4 预处理加速SiO 2 成核

DOI：
10.1116/6.0000691
发表时间：
2021
期刊：
Journal of Vacuum Science & Technology A
影响因子：
2.9
作者：
Zhang, Zhejun V.;Liu, Sumeng;Girolami, Gregory S.;Abelson, John R.
通讯作者：
Abelson, John R.

Nature of the Short Rh–Li Contact between Lithium and the Rhodium ω-Alkenyl Complex [Rh(CH 2 CMe 2 CH 2 CH═CH 2 ) 2 ] −

短 Rh-Li 的性质锂与铑 α-烯基配合物 [Rh(CH 2 CMe 2 CH 2 CH-CH 2 ) 2 ] 之间的接触

DOI：
10.1021/acs.inorgchem.1c00737
发表时间：
2021
期刊：
Inorganic Chemistry
影响因子：
4.6
作者：
Liu, Sumeng;Smith, Brett A.;Kirkland, Justin K.;Vogiatzis, Konstantinos D.;Girolami, Gregory S.
通讯作者：
Girolami, Gregory S.

Microscale vacuum distillation apparatus for high-boiling, air- and heat-sensitive liquids

用于高沸点、空气和热敏液体的微型真空蒸馏装置

DOI：
10.1016/j.talanta.2020.121747
发表时间：
2021
期刊：
Talanta
影响因子：
6.1
作者：
Liu, Sumeng;Girolami, Gregory S.
通讯作者：
Girolami, Gregory S.

Platinum ω-Alkenyl Compounds as Chemical Vapor Deposition Precursors: Synthesis and Characterization of Pt[CH 2 CMe 2 CH 2 CH═CH 2 ] 2 and the Impact of Ligand Design on the Deposition Process

铂α-烯基化合物作为化学气相沉积前驱体：Pt[CH 2 CMe 2 CH 2 CH–CH 2 ] 2 的合成和表征以及配体设计对沉积过程的影响

DOI：
10.1021/acs.chemmater.0c03226
发表时间：
2020
期刊：
Chemistry of Materials
影响因子：
8.6
作者：
Liu, Sumeng;Zhang, Zhejun;Gray, Danielle;Zhu, Lingyang;Abelson, John R.;Girolami, Gregory S.
通讯作者：
Girolami, Gregory S.