Exploratory Synthesis and Reactivity of Volatile Transition Metal Complexes and Use as Molecular Precursors

挥发性过渡金属配合物的探索性合成和反应性以及作为分子前体的用途

• 批准号: 1362931
• 负责人: Gregory Girolami
• 金额: $ 39万
• 依托单位: University of Illinois at Urbana-Champaign
• 依托单位国家: 美国
• 项目类别: Continuing Grant
• 财政年份: 2014
• 资助国家: 美国
• 起止时间: 2014-08-01 至 2018-07-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=1362931&HistoricalAwards=false
• 关键词: Exploratory; Synthesis; Reactivity; Volatile; Transition

With this award from the Chemical Synthesis (SYN) Program of the Chemistry Division of NSF, Professor Gregory S. Girolami of the University of Illinois at Urbana-Champaign will develop new and better molecular precursors for the chemical vapor deposition (CVD) and atomic layer deposition (ALD) of thin films. The current work will develop new classes of transition metal compounds, especially as they relate to the use of such molecules as precursors for the deposition of metal diborides, metal nitrides, and metal oxides. The work will enhance already existing interactions between Professor Girolami's group and leading companies in microelectronics development. The research will lead to deeper understandings of the chemistry of volatile transition metal compounds, and could lead to better ways to deposit the wires and insulators that are key components of modern-day computer chips. In addition, the award will contribute to the education of a diverse group of undergraduate and graduate students, and allow Professor Girolami to maintain his involvement in various services and outreach activities, such as library exhibits of rare books illustrating the history and advancement of science. The proposed activity is aimed toward the synthesis of new volatile compounds (especially of the transition metals), investigations of their chemical reactivities, and studies of their volatilities and utilities as thin film precursors. Some of the specific objectives of the current project are synthesis of new two-coordinate complexes of the late transition elements, and the chemical tuning of ligands to change the volatility, reducing power, and deposition activation energies of their complexes in a systematic way. In parallel, investigations of the use of these new CVD precursors for the chemical vapor deposition (CVD) and atomic layer deposition (ALD) will be carried out collaboratively with experts in these techniques.

鉴于NSF化学分部化学合成计划的奖项，Urbana-Champaign伊利诺伊大学的Gregory S. Girolami教授将开发用于化学蒸气沉积（CVD）的新的，更好的分子前体和薄膜原子层沉积（ALD）。 当前的工作将开发新的过渡金属化合物，尤其是与使用此类分子作为将金属二迪比尔，金属氮化物和金属氧化物沉积的前体相关的时。 这项工作将增强Girolami教授小组与微电子发展领域领先公司之间已经存在的互动。这项研究将导致对挥发性过渡金属化合物化学的更深入理解，并可能导致将电线和绝缘子沉积为现代计算机芯片的关键组成部分的更好方法。此外，该奖项将有助于对多样化的本科生和研究生的教育，并允许Girolami教授维持他参与各种服务和外展活动的参与，例如图书馆展览的稀有书籍展览，说明了科学的历史和进步。所提出的活性旨在合成新的挥发性化合物（尤其是过渡金属的），对其化学复活性的研究以及将其波动性和公用事业作为薄膜前体的研究。 当前项目的某些特定目标是综合后期过渡元件的新两坐标复合物，以及配体的化学调整以改变其复合物的挥发性，降低功率和沉积激活能量，以系统的方式进行。同时，将对这些新的CVD前体用于化学蒸气沉积（CVD）和原子层沉积（ALD）的研究将与这些技术的专家合作进行。