Volatile Transition Metal Compounds with New Ligand Archetypes: Exploratory Synthesis, Small Molecule Reactivity, and Use as Molecular Precursors

具有新配体原型的挥发性过渡金属化合物：探索性合成、小分子反应性以及用作分子前体

基本信息

批准号：
1112360
负责人：
Gregory Girolami
金额：
$ 39万
依托单位：
University of Illinois at Urbana-Champaign
依托单位国家：
美国
项目类别：
Continuing Grant
财政年份：
2011
资助国家：
美国
起止时间：
2011-08-15 至 2014-07-31
项目状态：
已结题

来源：
https://www.nsf.gov/awardsearch/showAward?AWD_ID=1112360&HistoricalAwards=false
关键词：
Volatile Transition Metal Compounds New

项目摘要

In this project funded by the Chemical Synthesis Program of the Chemistry Division, Professor Gregory S. Girolami of the Department of Chemistry of the University of Illinois will explore the synthesis of several classes of molecular precursors for electronic materials. The project involves the synthesis of new compounds, investigations of their chemical reactivities, and studies of their volatilities and utilities as thin film precursors. Some of the specific objectives of the current project are the development of volatile two-coordinate amido complexes of the late transition elements, and mechanistic studies of dealkylation reactions that are relevant both to chemical vapor deposition (CVD) and to the chemistry of dialkylamide ligands. In parallel, investigations of new CVD precursors for both metal borides and metal oxides will be carried out, using a new class of chelating borohydride ligands of the general formula NR2(BH3)2-. The broader impacts involve training undergraduate students, graduate students, and postdoctoral researchers, and broadening participation through the inclusion of researchers from underrepresented groups on the project. This work could lead to the development of better molecular precursors for chemical vapor deposition (CVD) and atomic layer deposition (ALD) growth of thin films. Such chemistry will have an impact on critical problems in the microelectronics industry, and could lead to faster and more capable microprocessors for computers and other electronic equipment. In addition, this project will provide excellent training of students, from pre-undergraduate to post-doctoral, including those from groups historically underrepresented in the sciences.

在化学部化学综合计划资助的该项目中，伊利诺伊大学化学系的Gregory S. Girolami教授将探索综合电子材料的几类分子前体。该项目涉及新化合物的合成，对其化学反应性的研究以及将其波动性和公用事业作为薄膜前体的研究。当前项目的一些特定目标是开发晚期过渡元件的挥发性两坐标膜复合物，以及与化学蒸气沉积（CVD）和对二酰胺酰胺配体化学性质相关的Dealkylation反应的机理研究。同时，将使用一类新的螯合硼氢化物配体NR2（BH3）2-对金属硼化物和金属氧化物的新CVD前体进行研究。更广泛的影响涉及培训本科生，研究生和博士后研究人员，以及通过包括代表性不足的小组的研究人员加入该项目的研究人员来扩大参与。这项工作可能导致化学蒸气沉积（CVD）和原子层沉积（ALD）生长的更好分子前体的发展。这种化学反应将对微电子行业的关键问题产生影响，并可能导致计算机和其他电子设备的更快，更有能力的微处理器。此外，该项目将提供从学前班到博士后的学生进行的出色培训，包括科学历史上人数不足的小组的学生。