SGER: Novel Ultra Fast Heating Platform for In-Situ Study of Nanoparticle Based Devices

SGER：用于纳米颗粒器件原位研究的新型超快速加热平台

• 批准号: 0811137
• 负责人: Veena Misra
• 金额: $ 6.74万
• 依托单位: North Carolina State University
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2008
• 资助国家: 美国
• 起止时间: 2008-03-01 至 2009-02-28
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0811137&HistoricalAwards=false
• 关键词: SGER; Novel; Ultra; Fast; Heating

Abstract-Veena Misra-SGERThe objective of this proposal is to investigate a highly innovative route inthe real-time formation and characterization of nanoparticle based electronic devices viaa revolutionary ultra thin SiC membrane platform that provides ultra-fast temperaturerates (1200degree centigrade/msec). This approach can revolutionize nanostructureformation which can substantially increase the commercialization potential ofnanodevices.Intellectual Merit:In recent years, nanoparticles have gained tremendous interest for their potential use in memory devices, chem-bio sensors and spintronics. However, one of the biggest challenges facing nanoparticle commercialization is the formation of dense, uniform and mono-disperse films. The inability to control kinetics of the anneal conditions, such as temperatures, ramp rates and cool down rates, typically used to form nanoparticles can lead to uncontrolled process leading to undesired sizes and variations. The study of kinetics at the millisecond range affords novel insight into nanostructure formation which will directly influence the device characteristics. Fully fabricated nanoscale devices will be integrated directly on the semiconductor membrane heating while undergoing simultaneous electrical characterization. Nanoscale MOSFETs and two-terminal coulomb blockade devices will be fabricated. The features of C-V and I-V curves, such as periodicity of steps, sharpness of steps, degree of charge storage and coulomb blockade window will be measured. With this system, over a hundred anneal/measurement steps can ultimately be achieved in a matter of seconds. Multiple discrete heaters, fabricated on a single wafer, can further expedite cycles of learning.Broader Impact: This knowledge will impact the fields of memories, sensors, photonics and bioelectronics. The system being proposed here is highly amenable to enhance education modules due to its small footprint and ease of access. We will use this system as a visualization tool for undergraduates to correlate dynamic changes in size and shape of nanostructures to device characteristics in real-time. Broader use of controlled and organized nanostructures will result in commercialization opportunities and give high return on investment in nanotechnology.

摘要 - 韦纳·米斯拉·塞格（Veena Misra-Sger）该提案的目的是研究基于纳米颗粒的电子设备的实时形成和表征的高度创新途径，可通过革命性的超薄SIC膜平台，该平台提供超快速温度（1200Degree Centerrese）。 这种方法可以彻底改变纳米结构形式，从而大大提高纳米版本的商业化潜力。智能优点：近年来，纳米颗粒对它们在记忆设备，化学生物传感器和旋转三位型的潜在使用方面具有极大的兴趣。然而，纳米颗粒商业化面临的最大挑战之一是形成了密集，统一和单分散膜的形成。无法控制退火条件的动力学，例如温度，坡道速率和冷却速率，通常用于形成纳米颗粒，可能会导致不受控制的过程，从而导致不希望的大小和变化。在毫秒范围内的动力学研究提供了对纳米结构形成的新见解，这将直接影响设备特性。完全制造的纳米级设备将直接集成在半导体膜加热上，同时进行同时进行电气表征。将制造纳米级MOSFET和两端库仑封锁装置。将测量C-V和I-V曲线的特征，例如步骤的周期性，步骤的清晰度，电荷存储程度和库仑封锁窗口。使用该系统，最终可以在几秒钟内实现一百多个退火/测量步骤。在单个晶圆上制造的多个离散的加热器可以进一步加快学习周期。BRODER的影响：这种知识将影响记忆，传感器，光子学和生物电子学领域。此处提出的系统非常适合增强教育模块，因为它的占地面积较小和易于访问。我们将使用该系统作为本科生的可视化工具，以实时将纳米结构的大小和形状变化与设备特性相关联。更广泛地使用受控纳米结构将带来商业化机会，并给予纳米技术的高投资回报。