Precision Dry Etching of 2D Materials: 2DETCH

2D 材料的精密干法蚀刻：2DETCH

• 批准号: EP/Z531121/1
• 负责人: Roman Gorbachev
• 金额: $ 113.25万
• 依托单位: University of Manchester
• 依托单位国家: 英国
• 项目类别: Research Grant
• 财政年份: 2024
• 资助国家: 英国
• 起止时间: 2024 至 无数据
• 项目状态: 未结题
• 来源: https://gtr.ukri.org/projects?ref=EP%2FZ531121%2F1
• 关键词: Precision; Dry; Etching; 2D; Materials

Scope: Nanotechnology lies at the heart of most modern technologies, from aerospace and automotive industries to optoelectronics through to surgical implants. Nanofabrication relies on a number of essential steps, including materials growth, device patterning and deposition of electrical contacts. In the last decade, 2D Materials (2DM) and their heterostructures have developed into a large multidisciplinary field. Their unique electronic, optical, mechanical and thermal properties have led to their use to demonstrate novel and improved performance in key areas of nanotechnology such as sustainable energy production and storage, sensors, low power electronics, communications and quantum technologies. Many billions of dollars are currently being invested in the EU, China, Korea and USA to scale up the infrastructure needed to transition 2DM technology to meet the demands of these applications.Vision: This proposal will provide a key experimental etching capability necessary to ensure that the UK remains a world leader in 2D materials nanofabrication. We propose to purchase a new state-of-the-art dry etching system, with capabilities to etch layers with atomic scale precision. This tool is one of the first commercial instruments allowing for atomic layer etching (ALE) and will enable controllable layer-by-layer 2D materials removal, currently not available anywhere in the UK. We will develop protocols and methodology to enable ALE functionality for key 2D materials and experimentally verify the results with a wide range of characterisation tools. The instrument will both provide new research capabilities and replace the current RIE system at National Graphene Institute which has reached the end of its life (15 years) to perform a broad range of already established tasks. The proposed instrument will be embedded in a world-leading centre of excellence for 2DM with dedicated staff support. It will be accessible to the whole UK 2D materials community through the Royce access scheme creating new opportunities for fundamental studies and supporting industrial development of 2D materials applications.The new etching platform will have the following key focus areas for 2DM applications:Low Power Electronics and Quantum Technologies: the new etcher will provide the ability to shape nanoscale devices with a high degree of tuneability but also at the wafer scale, with precise control of thicknesses, interfaces and electrical contacts.Sustainable Energy Generation and Storage: This facility will enable fabrication of model 2DM surfaces to generate new understanding of their function in electrodes and catalysis. It will also allow model nanoporous membranes to be synthesised and applied to generate new knowledge of their optimal geometries for fuel cells and in electrolysers.Biomolecular Sensors for Healthy Living: The proposed capability will advance creation of nanofluidic devices with angstrom-sized channels that enable unprecedented opportunities for nanoscale chemical sensing, molecular sieving and biomolecular analysis.To achieve this, the key objectives are:To develop and benchmark new world-leading capabilities for Atomic Layer Etching of 2DM.To successfully transition all current 2D etching to the new system, demonstrating equal or improved performance.To generate a suite of reliable protocols for different materials systems, providing improved efficiency by removing the current requirements to perform many repeat etchings simply to optimise fabrication conditions.Advertise the new capabilities to the whole UK 2D materials community, adding procedures if required in order to ensure broad usage of the system across the full range of application areas.

范围：纳米技术是大多数现代技术的核心，从航空航天和汽车行业到光电子通行到手术植入物。纳米化依赖于许多基本步骤，包括材料生长，设备模式和电触点的沉积。在过去的十年中，2D材料（2DM）及其异质结构已发展为大型多学科领域。它们独特的电子，光学，机械和热特性已导致它们用于展示纳米技术关键领域的新颖和改善性能，例如可持续能源生产和存储，传感器，低功率电子，通信和量子技术。目前正在欧盟，中国，韩国和美国投资数十亿美元，以扩大过渡2DM技术所需的基础设施以满足这些应用的需求。我们建议购买一种新的最先进的干蚀刻系统，并具有具有原子量表精度的蚀刻层的功能。该工具是允许原子层蚀刻（AL）的第一批商业仪器之一，它将启用可控的一层2D材料拆卸，目前在英国任何地方都不可用。我们将开发协议和方法，以启用关键2D材料的ALE功能，并通过广泛的表征工具实验验证结果。该工具将提供新的研究能力，并取代国家石墨烯研究所的当前RIE系统，该研究所已达到其生命的终结（15年），以执行已经确定的任务。拟议的乐器将嵌入到世界领先的2DM卓越中心中，并提供专用的员工支持。整个英国2D材料社区将通过Royce访问计划访问它，为基础研究创造新的机会，并支持2D材料应用的工业开发。新的蚀刻平台将在2DM应用中拥有以下关键焦点领域：低功率电子和量子技术：新蚀刻将与纳米级设备相同，但还可以使纳米级设备与Tuneebe a theeables conteriase，但还可以构成nansoscale设备的能力，但均具有高级范围的量表，均具有刺激性的量表。界面和电触点。可维护的能源产生和存储：该设施将使模型2DM表面能够产生对它们在电极和催化中的功能的新理解。 It will also allow model nanoporous membranes to be synthesised and applied to generate new knowledge of their optimal geometries for fuel cells and in electrolysers.Biomolecular Sensors for Healthy Living: The proposed capability will advance creation of nanofluidic devices with angstrom-sized channels that enable unprecedented opportunities for nanoscale chemical sensing, molecular sieving and biomolecular analysis.To实现这一目标，关键目标是：开发和基准基准的新世界领先的功能，用于蚀刻2Dm的原子层，以成功地过渡所有当前的2D蚀刻到新系统，以表现出平等或改善的性能，以使一系列可靠的协议为不同的材料系统产生一系列可靠的协议，从而使当前的效率更加优化，以使许多重复的效率能够促进许多效率，从而使许多重复的效率取得了良好的效率，以使许多重复的效率取得了影响，以使许多重复的效率取得了良好的效率。材料社区，如果需要添加程序，以确保整个应用领域的系统广泛使用。