Electrostatic microactuator which produces power of ratio 10, 000 times than conventional electrostatic microactuator by using non-linear elastic force

利用非线性弹力产生比传统静电微致动器10, 000倍的功率的静电微致动器

• 批准号: 21560263
• 负责人: MINAMI Kazuyuki
• 金额: $ 3.08万
• 依托单位: Yamaguchi University
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (C)
• 财政年份: 2009
• 资助国家: 日本
• 起止时间: 2009 至 2011
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-21560263/
• 关键词: MEMS; マイクロアクチュエータ

The novel drive principle, that makes electrostatic force collaborate with the non-linear spring, and the electrostatic microactuator driven by that principle were proposed. By the detailed simulation using the finite element method, the electrostatic microactuators which had the output of 931 times higher than the previous one were designed, and it was seen that the output of more than 10, 000 times higher was possible if shape and dimensions of stricture, and micromachining technique were improved. They proved the excellence of novel drive principle and structure of the microactuator. In addition, the problems on the fabrication were clarified experimentally by trial manufacture.

提出了静电力与非线性弹簧配合的新颖驱动原理以及利用该原理驱动的静电微执行器。通过使用有限元方法的详细模拟，设计了输出比以前高出931倍的静电微致动器，并且可以看出，如果形状和尺寸为狭窄和微加工技术得到了改进。他们证明了微执行器新颖的驱动原理和结构的卓越性。此外，通过试制，澄清了制造上的问题。

项目成果

垂直可動型非線形板バネの提案とFEMシミュレーションによる設計

垂直移动非线性板簧的提案和使用有限元模拟的设计

• 发表时间: 2011
• 作者: 岡田徳次;吉田友也;益本寛之
• 通讯作者: 益本寛之

静電アクチュエータ

静电致动器

• 发表时间: 2011

Design and Evaluation of High Performance Electrostatic Microaotuator having Diaphragm-Electrodes Structure

高性能膜片电极结构静电微致动器的设计与评估

• 发表时间: 2011
• 作者: 李作維;泉照之;伊藤剛;HAYASHI Tomohiro
• 通讯作者: HAYASHI Tomohiro

垂直可動型静電-弾性協働マイクロアクチュエータの構造および製作プロセスの検討

垂直移动静电弹协同微执行器结构及制作工艺研究

• 发表时间: 2011
• 作者: 岡田徳次;モハメドアビア;ボテリョバーグナ;上之郷将志;益本寛之
• 通讯作者: 益本寛之

Design and Evaluation of High Performance Electrostatic Microactuator having Diaphragm-Electrodes Structure

薄膜电极结构高性能静电微执行器的设计与评估

• 发表时间: 2011
• 作者: H.Mitsuda;M.Komori;M.Subkhan;A.Inoue;HAYASHI Tomohiro
• 通讯作者: HAYASHI Tomohiro