A Study of Micro-Accelerometer Using Silicon Ring Resonator

采用硅环谐振器的微加速度计的研究

• 批准号: 20710102
• 负责人: SUZUKI Masato
• 金额: $ 2.83万
• 依托单位: Kansai University
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Young Scientists (B)
• 财政年份: 2008
• 资助国家: 日本
• 起止时间: 2008 至 2010
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-20710102/
• 关键词: 加速度センサ; 光リング共振器; 慣性力センサ; シリコンフォトニクス; マッハツェンダ干渉計; 光学シミュレーション; 多モード干渉光導波路(MMI); 光計測; 光導波路; MEMS(マイクロマシン); 光干渉; 機械シミュレーション

A concept accelerometer was newly proposed which uses an optical interference of propagated light in Si waveguide. In this sensor, one waveguide of Mach-Zehnder interferometer (MZI) has floating beam structure (air-bridge type) which crosses with a cantilever supporting a proof mass in same plane. When the inertial force is applied to the proof mass, the floating waveguide is expanded and the output of the MZI is modulated. As a result of optical simulation and measurement of fabricated device, optical loss at the intersection of waveguide and supporting cantilever (50μm in width) becomes very small when the f the waveguide at the intersection is Multi-Mode interference (MMI) waveguide. Finally, we confirm the performance of the fabricated accelerometer by measurement of its optical modulation response to applying force.

新提出了一种利用硅波导中传播光的光学干涉的概念加速度计。在该传感器中，马赫-曾德尔干涉仪（MZI）的一个波导具有与支撑证明物的悬臂交叉的浮动梁结构（空气桥型）。当惯性力施加到检验质量上时，浮动波导会膨胀，并且 MZI 的输出会受到调制。当相交处的波导是多模干涉（MMI）波导时，波导和支撑悬臂梁（宽度为50μm）相交处的f变得非常小最后，我们通过测量其光调制来确认所制造的加速度计的性能。对施加力的反应。

项目成果

Design and Simulation of Inertial Force Sensor Using Mach-Zehnder Interferometer with Optical Waveguides Made of Crystal Silicon

晶体硅光波导马赫曾德尔干涉仪惯性力传感器的设计与仿真

• 发表时间: 2009
• 期刊: IEEJ Transactions on Sensors and Micromachines 129
• 作者: S. Imaizumi;H. Matsumoto;K. Suzuki;M. Minagawa;M. Kimura;A. Tanioka;Masato Suzuki
• 通讯作者: Masato Suzuki

マルチモード干渉を利用したSi光導波路の平面交差とその慣性センサのへの応用

利用多模干涉的硅光波导平面交叉及其在惯性传感器中的应用

• 发表时间: 2009
• 作者: 松本英俊;今泉伸治;坪井一真;皆川美江;谷岡明彦;鈴木昌人
• 通讯作者: 鈴木昌人

Inertial Force Sensor Using Mach-Zehnder Interferometer with Optical Waveguides Made of Crystal Silicon

采用马赫曾德干涉仪和晶体硅光波导的惯性力传感器

• 发表时间: 2008
• 作者: M.Suzuki;G.Kawai;H.Izumi;S.Aoyagi;S.Yokoyama
• 通讯作者: S.Yokoyama

A Design and Simulation of Inertial Force Sensor Using Mach-Zehnder Interferometer with Optical Waveguides Made of Crystal Silicon

晶体硅光波导马赫曾德干涉仪惯性力传感器的设计与仿真

• 发表时间: 2009
• 期刊: IEEJ Transactions on Sensors and Micromachines Vol.129
• 作者: M.Suzuki;G.Kawai;H.Izumi;S.Aoyagi;S.Yokoyama;T.Takahashi;S.Aoyagi;Y.Amemiya;M.Fukuyama;S.Yokoyama
• 通讯作者: S.Yokoyama

Fabrication of Micro Accelerometer Using Screen Printed BaTiO_3 Film on a Ceramic Substrate and Its Characterization

陶瓷基板上丝网印刷BaTiO_3薄膜微加速度计的制作及其表征

• 发表时间: 2009
• 期刊: IEEJ Transactions on Sensors and Micromachines Vol.129(In Print)
• 作者: M. Suzuki;G. Kawai;H. Izumi;S. Aoyagi;S. Yokoyama
• 通讯作者: S. Yokoyama