Multifunction ActiveAerostatic Coupling for Ultraprecision Positioning System

用于超精密定位系统的多功能主动空气静力耦合器

基本信息

批准号：
18560105
负责人：
MIZUMOTO Hiroshi
金额：
$ 2.48万
依托单位：
Tottori University
依托单位国家：
日本
项目类别：
Grant-in-Aid for Scientific Research (C)
财政年份：
2006
资助国家：
日本
起止时间：
2006 至 2007
项目状态：
已结题

来源：
https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-18560105/
关键词：
Positioning Machine Tool Aerostatic bearing Active control Inherent restrictor Aerostatic coupling Nanotechnology

项目摘要

A multifunction active aerostatic coupling is proposed for improving the performance of ultraprecision positioning system. This aerostatic coupling is characterized to have an active aerostatic thrust bearing and the positioning system employing the coupling has following functions:(1) Isolation of vibration from the driving mechanism : Lateral vibration of the driving mechanism generates the table vibration in the order of several micrometers. By using the aerostatic coupling, the vibration of the driving mechanism is isolated and the table vibration is reduced to the nanometer order.(2) Improvement of thrust stiffness : The use of the aerostatic coupling is effective for improving the accuracy of the table motion, however, there occurs some decrease in the thrust stiffness of the feed drive device. Active control of the aerostatic thrust bearing in the coupling realizes the infinite thrust stiffness. The effect of the active control on the dynamic thrust stiffness can also be seen to the frequency of 10Hz.(3) Ultraprecision positioning: The active aerostatic coupling has the function of short-stroke positioning with high-resolution. The experiment of step positioning shows that the positioning resolution of the active aerostatic coupling is 50pm at least. The coupling also controls the micro rotation of the table in the order of μrad. These functions are effective for improving the positioning performance of the ultraprecision positioning system used in the several fields of nanotechnology, such as ultraprecision machine tool, ultraprecision measuring machine, and stepper for LSI.

提出了一个多功能主动空气耦合，以改善超压缩定位系统的性能。这种空气稳定的耦合的特征是具有主动的空气推力轴承，采用耦合的定位系统具有以下功能：（1）从驱动机制中分离振动：驱动机制的横向振动会在几微米的阶内产生桌子振动。通过使用气压耦合，隔离驾驶机理的振动，并将表振动降低到纳米级。（2）改善推力刚度：使用空气稳定耦合有效地有效地提高了桌子运动的准确性，但会在进料驱动器设备的推力僵硬设备的推力刚度中降低。耦合中的空气推力轴承的主动控制实现了无限推力刚度。主动控制对动态推力刚度的影响也可以看到10Hz的频率。（3）超压缩定位：主动的气压耦合具有高分辨率定位的功能，并具有高分辨率。阶跃定位的实验表明，活性空气耦合的定位分辨率至少为50pm。耦合还控制了表中表的微旋转。这些功能可有效地改善纳米技术领域中使用的超压缩定位系统的定位性能，例如Ultryprecision机床，UlterPrecision Measiting Machine和LSI的步进器。