Development of an Angstrom Positioning System

Angstrom 定位系统的开发

基本信息

批准号：
07555375
负责人：
MIZUMOTO Hiroshi
金额：
$ 2.11万
依托单位：
Tottori University
依托单位国家：
日本
项目类别：
Grant-in-Aid for Scientific Research (A)
财政年份：
1995
资助国家：
日本
起止时间：
1995 至 1996
项目状态：
已结题

来源：
https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-07555375/
关键词：
angstrom positioning aerostatic bearing aerostatic guideway diamond turning friction drive machine tool nanotechnology positioning system twist-roller friction drive

项目摘要

It has been reported by the head investigaor that the positioning resolution of the twist-roller friction drive hydrostatic bearing type can be 0.2nm. In the present reearch, a twist-roller friction drive of ball bearing type is proposed for realizing an angstrom positioning system which can be used in ultraprecision machine tools and measuring machines. A positioning system havibg two-axs (X-axis and Z-axis) was made, and the positioning performance of each axis was analyzed. The X-asix employs a large size of twist-roller friction drive and an aeroatatic guideway, while the Z-axis employs a small size of twist-roller friction drive and a cross-roller guideway. The positioning resolution of the X-axis was shown to be 0.5nm, and in spite of the use of ball bearings, it is proved that the twist-roller friction drive can realize the angstrom positioning. The positioning resolution of the Z-axis was 10nm, which is as small as the positioning resolution of the ball screw. A diamond turning test was executed by mounting a work spindle on the X-table and a tool post on the Z-table. A mirror-like surface was obtained by turning, thus the two-axs positioning system can be regarded as an ultra-precision machine tool. The research concludes that the twist-roller friction drive of ball bearing type facilitates the manufacture of an ultraprecision positioning system which can be used in as clean environement, and can take the place of the ball screw.

头部调查员已经报道说，扭动摩擦驱动静液压轴承类型的定位分辨率可能为0.2nm。在当前的重新搜索中，提出了一种旋转旋转摩擦驱动器类型的驱动器，以实现可用于超压缩的机床和测量机中的Angstrom定位系统。进行了定位系统HaviBG两轴（X轴和Z轴），并分析了每个轴的定位性能。 X-Asix采用了大量的扭动摩擦驱动器和航空通道，而Z轴则采用了少量的扭动摩擦驱动器和交叉滚动指南。 X轴的定位分辨率显示为0.5nm，尽管使用滚珠轴承，但证明扭曲旋转摩擦驱动器可以实现Angstrom定位。 Z轴的定位分辨率为10nm，与球螺钉的定位分辨率一样小。通过将工作主轴安装在X台式上，并在Z台上安装工具柱来执行钻石转弯测试。通过转动获得了镜面状的表面，因此两轴定位系统可以视为超精确的机床。研究得出的结论是，滚珠轴轴承类型的扭曲摩擦驱动器促进了可以在干净的环境中使用的超压缩定位系统的制造，并且可以代替球螺钉。