Development of an Infinite-Stiffness Aerostatic Bearing

无限刚度空气静压轴承的研制

• 批准号: 02650115
• 负责人: MIZUMOTO Hiroshi
• 金额: $ 0.9万
• 依托单位: Tottori University
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for General Scientific Research (C)
• 财政年份: 1990
• 资助国家: 日本
• 起止时间: 1990 至 1991
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-02650115/
• 关键词: Active restrictor; Aerostatic bearing; Aerostatically controlled restrictor; Exhaust control restrictor; Infinite stiffness; Rotational accuracy

Two types of active restrictors are used for obtaining infinitestiffness aerostatic bearings. One of the active restrictors is an Aerostatically Controlled Restrictor(ACR), which is incorporated into an aerostatic thrust bearing. The diameter of the thrust plate of the thrust bearing is 65mm. Opening of the ACR is controlled by an aerostatic bearing, and the characteristic of the active restrictor can easily be changed, and the bearing stiffness is adjusted to be infinite. When the supply pressure is 0.49MPa, the thrust stiffness of the bearing can be infinite for the load smaller than 240N. Negative thrust stiffness can also be realized. Another active restrictor is an Exhaust Control Restrictor(ECR), which is incorporated into a two-row aerostatic radial bearing. Bore diameter of the radial bearing is 40mm. Opening of the ECR is controlled by a piezoelectric actuator which is controlled by a micro computer. When the supply is 0.49MPa, the radial stiffness of the bearing can be infinite for the load smaller than 70N. These infinite-stiffness thrust bearing and radial bearing are combined to construct an air spindle. Rotational accuracy of the air spindle is less than 20nm in the axial direction, and less than 50nm in the radial direction. Infinite stiffness can also be obtained when the load is

两种类型的主动限制器用于获得无限端的空气固定轴承。活动限制器之一是空气控制的限制器（ACR），该限制器被纳入空气推力轴承中。推力轴承的推力板的直径为65mm。 ACR的打开由空气轴承控制，并且可以轻松更改活动限制器的特征，并且轴承刚度被调整为无限。当电源压力为0.49MPa时，对于小于240N的负载，轴承的推力刚度可能是无限的。负推力刚度也可以实现。另一个主动限制器是排气控制限制器（ECR），该限制器被掺入两排气动径向轴承中。径向轴承的直径为40mm。 ECR的打开由由微型计算机控制的压电执行器控制。当电源为0.49MPa时，对于小于70N的负载，轴承的径向刚度可能是无限的。这些无限的刺激性推力轴承和径向轴承被合并以构建空气主轴。在轴向方向上，空气主轴的旋转精度小于20nm，在径向方向上小于50nm。当负载为时，也可以获得无限的刚度

项目成果

水本 洋,田中 久隆,奥野 勝則,松原 十三生,川上 隆一: "排気制御絞りによる空気静圧軸受の無限剛性化" 精密工学会誌. 57. 2054-2059 (1991)

Hiroshi Mizumoto、Hisataka Tanaka、Katsunori Okuno、Juzo Matsubara、Ryuichi Kawakami：“使用排气控制节流阀的空气静压轴承的无限刚度”日本精密工程学会杂志 57。2054-2059（1991）。

H.Mizumoto,T.Matsubara,H.Yamamoto,K.Okuno and M.Yabuya: "An Infinite-stiffness Aerostatic Bearing with an Exhaust-control Restrictor" Progress in Precision Engineering (Proc.of 6th IPES). 315-316 (1991)

H.Mizumoto、T.Matsubara、H.Yamamoto、K.Okuno 和 M.Yabuya：“带有排气控制限制器的无限刚度空气静压轴承”精密工程进展（第 6 届 IPES 论文集）。

H.Mizumoto,K.Okuno,T.Matsubara and M.Yabuya: "An infiniteーstiffness aerostatic bearing with an exhaustーcontrol restrictor" Bull.of JSPE.

H.Mizumoto、K.Okuno、T.Matsubara 和 M.Yabuya：“带有排气控制限制器的无限刚度空气静压轴承”Bull.of JSPE。