An Ultraprecision Aerostatic Guideway Controlled by Active Inherent Restrictors

主动固有限流器控制的超精密空气静压导轨

• 批准号: 07650178
• 负责人: MIZUMOTO Hiroshi
• 金额: $ 1.47万
• 依托单位: Tottori University
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (C)
• 财政年份: 1995
• 资助国家: 日本
• 起止时间: 1995 至 1996
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-07650178/
• 关键词: active restrictor; aerostatic bearing; aerostatic guideway; infinite stiffness; inherent restrictor; piezoelectric actuator; positioning system; straightness; 超精密工作機械

An active control method for improving the performance of an aerostatic guideway used in an ultraprecision positioning system is proposed. The proposed method employs an Active Inherent Restrictor (AIR) to control pneumatic pressure onthe guideway. The AIR invented by the authors consists of a piezoelectric actuator having a through hole, one end of which is small enough to function as an orificewhen the actuator is embedded in the guideway to be controlled. Six AIRs are incorporated into the table guided by the aerostatic guideway ; four AIRs for compensating the vertical displacement, and two for the horizontal displacement. According to the table displacements detected by sensors, amicro computer changes the length of the piezoelectric actuators for controlling the orifice area of the AIRs, and for compensating the displacements. In both vertical and horizontal directions, it was provedthat the stifness of the guideway can be infinite, and the straightness of motion of the table can beabout 20nm, while the pneumatic hammer did not occur. The effect of the AIR on diamond tuning is also shown ; an aluminum alloy mounted on the table controlled by the AIR was tuned, and the roughness on the machined surface can be improved.

提出了一种积极的控制方法，用于改善超压缩定位系统中使用的空气导向管的性能。所提出的方法采用主动固有限制器（空气）来控制导向的气动压力。作者发明的空气由一个具有贯穿孔的压电执行器组成，当执行器嵌入到指导渠中以控制以进行控制时，其一端的一端足够小，可以用作孔口。在空气导向管引导下，将六个空气纳入了桌子中；四个用于补偿垂直位移的空气，两个用于水平位移。根据传感器检测到的表位移，Amicro计算机会更改压电执行器的长度，以控制空气的孔口区域，并补偿位移。在垂直方向和水平方向上，这证明了导向道的窒息性可以是无限的，并且表的运动的直率可以使20nm beaber teabe teake tebebout tebebout hammer，而不会发生气动锤。还显示了空气对钻石调节的影响；调节了安装在空气控制的桌子上的铝合金，并可以改善加工表面上的粗糙度。