Development of acoustic input and output devices far MRI scanners and nuclear plants

开发 MRI 扫描仪和核电站的声学输入和输出设备

• 批准号: 17360157
• 负责人: OHKAWA Masashi
• 金额: $ 9.52万
• 依托单位: Niigata University
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (B)
• 财政年份: 2005
• 资助国家: 日本
• 起止时间: 2005 至 2007
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-17360157/
• 关键词: Optical microphon; Integrated optics; Diaphragm; Optical waveguide; MEMS; MOEMS

The guided-wave optical microphone can work even in a hazardous environment, such as a high magnetic field like the MRI, high RFI fields, and other environments that require EMI/RFI immunity.The optical microphone consists of a rectangular diaphragm and a straight waveguide on the diaphragm. The sensitivity of the microphone and the resonance frequency of the diaphragm are dependent on the diaphragm dimensions. In this study, the target values for phase sensitivity and resonance frequency were set at 2.5 mrad/Pa and 3.4 kHz, respectively. By design considerations, the diaphragm dimensions were determined to be 20 mm×20 mm×0.15 mm. Measured sensitivity of the fabricated microphone was L3 mrad/Pa, almost a half of the target value. The fabricated microphone detected a sound wave of 1 kHz and 2 Pa, corresponding to 100 dB-SPL (sound pressure level). Moreover from measured frequency characteristics of three fabricated microphones with a 20 mm×20 mm×0.15 mm diaphragm, resonance frequencies were 2.7, 3.3 and 3.7 kHz, similar to the theoretical one.Incidentally, silicon is an attractive substrate because of its excellent mechanical properties, which provide the optical microphone with minituarization feasibility. In the last two years, the silicon-based guided-optic microphone has also been developed, and the fabricated optical microphone with a 10 mm×10 mm×40μm diaphragm successfully detected a sound wave of 0.2 Pa (80 dB-SPL) and 1 kHz. Moreover from the frequency characteristic, resonance frequency was experimentally determined to be 5.3 kHz, quite similar to the theoretical one of 5.6 kHz.

引导波光学麦克风即使在危险环境中也可以工作，例如高磁场，例如MRI，高RFI场以及其他需要EMI/RFI免疫组织化学的环境。光学麦克风由矩形隔膜组成，隔膜上的笔直波导组成。麦克风的灵敏度和隔膜的共振频率取决于隔膜尺寸。在这项研究中，相位灵敏度和共振频率的目标值分别设置为2.5 mrad/pA和3.4 kHz。根据设计考虑，确定隔膜尺寸为20 mm x 20 mm x 0.15 mm。所测量的麦克风的灵敏度为L3 MRAD/PA，几乎是目标值的一半。制造的麦克风检测到1 kHz和2 pa的声波，对应于100 db-spl（声压水平）。此外，从具有20 mm x 20 mm x 0.15 mm隔膜的三个制造麦克风的测量频率特性中，谐振的频率为2.7、3.3和3.7 kHz，类似于理论上，硅是一种有吸引力的基质，因为它具有出色的机械性能，其优异的机械性能，可提供光学麦克风效率。在过去的两年中，还开发了基于硅的指导式麦克风，并且具有10 mm x 10 mm x40μm隔膜的制造光学麦克风成功地检测到了0.2 pa（80 db-spl）和1 kHz的声波。此外，从频率特征中，共振频率被实验确定为5.3 kHz，与5.6 kHz的理论非常相似。

项目成果

Sensitivity dependence on waveguide position in silicon-based optical flow sensor

硅基光流传感器中波导位置的灵敏度依赖性

• 发表时间: 2007
• 作者: S.;Murase;H.;Kuwashima;N.;Nanato;S.;B.;Kim;Y.;Yamada;A.;Nitta;K.;Tachikawa;Masafumi Adachi
• 通讯作者: Masafumi Adachi

Sensitivity dependence with respect to diaphragm dimensions in a glass-based guided-wave optical pressure sensor

玻璃导波光学压力传感器中的灵敏度与膜片尺寸的相关性

• 发表时间: 2007
• 作者: S.;B.;Kim;Y.;Okimoto;S.;Murase;H.;Okada;S.;Noguchi;Yu Watanabe
• 通讯作者: Yu Watanabe

光弾性効果を利用した光導波型マイクロホンの実現可能性

利用光弹性效应实现光波导麦克风的可能性

• 发表时间: 2005
• 期刊: 第15回電気学会東京支部新潟支所研究発表会予稿集
• 作者: Hiroyuki;Nikkuni;et. al.;新國 広幸
• 通讯作者: 新國 広幸

Improvement of the Signal-to-Noise ratio in a Glass-Based Guided-Wave Optical Microphone

玻璃导波光学麦克风信噪比的改进

• 发表时间: 2007
• 期刊: Proceedings of SPIE 6475
• 作者: Hiroyuki;Nikkuni;et. al.;S. B. Kim;Hiroyuki Nikkuni;S. B. Kim;Hiroyuki Nikkuni
• 通讯作者: Hiroyuki Nikkuni

ガラス基板光導波型マイクロホンに関する研究 〜S/N比の向上〜

玻璃基板光波导麦克风的研究～信噪比的提高～

• 发表时间: 2006
• 期刊: 電子情報通信学会・2006年ソサエティ大会講演論文集
• 作者: Hiroyuki;Nikkuni;et. al.;SeokBeom Kim;Manabu Hayashi;Jin-Hong Joo;SeokBeom Kim;Jin-Hong Joo;Hiroyuki Nikkuni;SeokBeom Kim;Kaoru Sato;SeokBeom Kim;下山雅弘;林 学
• 通讯作者: 林 学