Development of guided-wave optical sensors with a micromechanical structure and its design support system

微机械结构导波光学传感器及其设计支持系统的研制

• 批准号: 22560322
• 负责人: OHKAWA Masashi
• 金额: $ 2.83万
• 依托单位: Niigata University
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (C)
• 财政年份: 2010
• 资助国家: 日本
• 起止时间: 2010 至 2012
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-22560322/
• 关键词: 光デバイス; 光回路; 光導波型センサ; 光集積回路; マイクロマシン; 光導波路; ＭＯＥＭＳ; 設計; MOEMS

In order to establish design guidelines for guided-wave optical sensors with a micromechanical structure, sensitivity dependences on waveguide position, diaphragm dimensions and so on were determined by theoretical and experimental examinations. Also, regarding an effect of squeeze-film air damping in guided-wave optical microphones, damping ratio was found to increase as air-film thickness decreased, similar to the rough theoretical prediction. Moreover, for guided-wave optical pressure and flow sensors, desktop and web applications to design waveguide and diaphragm were developed, based on our theoretical and experimental results of each sensor.

为了建立具有微机械结构的导波光学传感器的设计指南，通过理论和实验检查确定了灵敏度对波导位置、隔膜尺寸等的依赖性。此外，关于导波光学麦克风中的挤压膜空气阻尼的效果，发现阻尼比随着空气膜厚度的减小而增加，这与粗略的理论预测类似。此外，对于导波光学压力和流量传感器，根据我们每个传感器的理论和实验结果，开发了用于设计波导和隔膜的桌面和网络应用程序。

项目成果

佐藤孝,シリコン基板光導波型加速度センサにおけるセンサ感度の導波路位置依存性

Takashi Sato，硅基板光波导加速度传感器中传感器灵敏度的波导位置依赖性

• 发表时间: 2010
• 作者: G. Jin;H. Chen;C. Gao;Y. Zhang;H. Kobayashi;N. Takai;K. Niitsu;K. Hadidi;大島卓也,三浦雄介,大河正志
• 通讯作者: 大島卓也,三浦雄介,大河正志

Silicon-based guided-wave optical accelerometer: experimental consideration to establish its design guideline

硅基导波光学加速度计：建立其设计指南的实验考虑

• 发表时间: 2012
• 期刊: 2012 IEEE SENSORS Proceedings
• 作者: N. Saito;Y. Miura;T. Oshima;M. Ohkawa;T. Sato
• 通讯作者: T. Sato

Sensitivity Dependences on Waveguide Position and Diaphragm Thicknessin Silicon-Based Guided-Wave Optical Accelerometer

硅导波光学加速度计中波导位置和膜片厚度的灵敏度依赖性

• 发表时间: 2010
• 作者: B.Dai;T.Kato;S.Iwata and S.Tsunashima;Masashi Ohkawa
• 通讯作者: Masashi Ohkawa

Sensitivity Dependences on Waveguide Position and Diaphragm Thickness in Silicon-Based Guided-Wave Optical Accelerometer

硅基导波光学加速度计中波导位置和膜片厚度的灵敏度依赖性

• 发表时间: 2010
• 作者: M. Ohkawa H. Endo;T. Oshima;Y. Miura;T. Sato
• 通讯作者: T. Sato

Consideration of Sensitivity with Respect to Waveguide Position and Diaphragm Thickness in Silicon-Based Guided-Wave Optical Accelerometer

硅基导波光学加速度计中波导位置和膜片厚度的灵敏度考虑

• 发表时间: 2010
• 作者: Y. Miura;H. Endo;T. Oshima;M. Ohkawa;T. Sato
• 通讯作者: T. Sato