Development of integrated optic pressure sensor to be incorporated into a catheter for blood pressure measurement

开发集成光学压力传感器，将其集成到用于血压测量的导管中

• 批准号: 12650339
• 负责人: OHKAWA Masashi
• 金额: $ 2.24万
• 依托单位: Niigata University
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (C)
• 财政年份: 2000
• 资助国家: 日本
• 起止时间: 2000 至 2002
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-12650339/
• 关键词: Pressure Sensor; Integrated Optics; Silicon; Diaphragm; Micromachine; 光集積回路

The purpose of this study is to develop an integrated optic pressure sensor that can be inserted into a catheter to measure blood pressure. The sensor consists of a diaphragm as a pressure-sensitive structure and a straight single-mode waveguide across the diaphragm.First, we theoretically examined sensor sensitivity with respect to waveguide position and diaphragm dimensions. According to the theoretical results, sensitivity remains constant even if the diaphragm dimensions are reduced as long as both the side length ratio and the characteristic length remain constant. Next, such a scale-reduction rule was experimentally examined using three fabricated sensors with the same side length ratio and the same characteristic length. The exact dimensions of the sensors were 2.0mm×10mm×35μm, 2.5mm×12.5mm×49μm, and 3.0mm×15mm×64μm. The measured sensitivities of the three sensors were quite similar to each other as theoretically predicted.Finally, we fabricated the first prototype version using a mimic catheter ten times larger than a 6F catheter. Since the sensor was intended to be inserted into a 20mm-long mimic catheter with a diameter of 20mm, its dimensions were set to be 10mm×20mm×420μm, with the diaphragm dimensions of 1.5mm×7.5mm×23μm. The sensor sensitivity was 81mrad/kPa, which is sufficient to measure blood pressure. Although the fabricated sensor is still quite large, by reducing the diaphragm dimensions based on the scale-reduction rule, the realization of a miniaturized sensor that can be inserted into the catheter can be expected.

这样做的目的是发展隔膜作为压力敏感和海峡和横跨diaphragmm.fir的隔膜的光学压力如果尺寸降低，因为侧面长度和征兆重新构造，使用三个相同的长度比和相同的特征长度进行了实验性的尺度还原规则。 x35μm，2.5mm x 12.5mm x49μm和3.0mm x 15mm x 15mm64μm。比6F导管。尽管制造的传感器仍然很大，但通过diaphragram Enimesions，基于Minia转移的传感器的比例回复，可以预期将其插入导管中。

项目成果

Atsushi Yamada: "Scale reduction rule for diaphragm dimensions to miniaturize a silicon-based integrated optic pressure sensor without reducing sensitivity"Proceedings of SPIE. 4987. (2003)

Atsushi Yamada：“隔膜尺寸的缩小规则，可在不降低灵敏度的情况下小型化硅基集成光学压力传感器”SPIE 论文集。

Atsushi Yamada: "Scale reduction rule for diaphragm dimensions to miniaturize a silicon-based integrated optic pressure sensor without reducing sensitivity"Proceedings of SPIE. 4987-32(印刷中). (2003)

Atsushi Yamada：“在不降低灵敏度的情况下小型化硅基集成光学压力传感器的隔膜尺寸缩小规则”，SPIE 论文集 4987-32（出版中）。

Takeshi Goto: "An experimental investigation of sensitivity dependence with respect to waveguide position micromachined diaphragm in a silicon-based integrated optic pressure sensor"Proceedings of SPIE. 4591. 337-344 (2001)

Takeshi Goto：“硅基集成光学压力传感器中波导位置微机械隔膜灵敏度依赖性的实验研究”SPIE 论文集。

七澤正洋: "偏光干渉型光集積回路圧力センサにおける位相感度のダイヤフラム厚による違い"2000年電子情報通信学会エレクトロニクスソサイエティ大会講演論文集1. 講演番号C-3-56. 181-181 (2000)

Masahiro Nanasawa：“偏振干涉型光学集成电路压力传感器中膜片厚度导致的相位灵敏度差异”2000 年 IEICE 电子学会会议记录 1。演讲编号 C-3-181 (2000)。

Yumi Okamoto: "Sensitivity dependence with respect to diaphragm thickness in integrated optic pressure sensor"Technical Digest of the Third Asian Pacific Laser Symposium. WePA45. 95 (2002)

Yumi Okamoto：“集成光学压力传感器中隔膜厚度的灵敏度依赖性”第三届亚太激光研讨会技术文摘。