Development of high-frequency scanning near-field microscopy and investigation of its applications

高频扫描近场显微镜的研制及其应用研究

• 批准号: 15360181
• 负责人: NOZOKIDO Tatsuo
• 金额: $ 9.66万
• 依托单位: University of Toyama (2005)Tohoku University (2003-2004)
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (B)
• 财政年份: 2003
• 资助国家: 日本
• 起止时间: 2003 至 2005
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-15360181/
• 关键词: Scanning Near-Field Microscopy; Slit Probe; Millimeter Wave; Terahertz Wave; Passive Microscopy; Multi Function; Application; 高分解能化; スリット型プロ-ブ

Diffraction effects limit the resolution of conventional imaging microscopes to about the radiation wavelength used. However, sub-wavelength resolution below the diffraction limit can be achieved by the technique of scanning near-filed microscopy. The objective of this research project is to develop new microscopy formats and their related technologies in the millimeter-wave and terahertz regions in regard to our original microscope system using a metal slit-type probe that we had developed mainly in the millimeter-wave region, and to investigate new applications of the millimeter-wave and terahertz microscopy.We have proposed and experimentally demonstrated scanning near-field anisotropy microscopy in the millimeter-wave region, permitting the observation of electrical anisotropy in the viewed object. We also proposed a passive microscopy format that enables completely non-destructive and non-invasive measurements and succeeded to experimentally demonstrate its image reconstruction pr … More inciple in the millimeter-wave region. In order to improve measurement sensitivity of the slit probe, we have proposed, designed and fabricated a resonant slit-type probe for millimeter-wave microscopy. Experiments performed in the millimeter-wave region show that the resonant probe has more than ten times greater sensitivity than a conventional tapered slit-type probe.To demonstrate terahertz microscopy using a slit-type probe, we have tried to optimize the geometry of the tapered slit probe operated at a terahertz frequency band of 0.3 THz. Based on the design criteria derived from the optimization process, a tapered slit probe was fabricated by electro-forming technique. We have verified that the measured RF performance of the probe agrees well with the predicted one obtained using the finite element method.We have applied the above mentioned microscopy formats and technologies to the characterization of planar dielectric substrates, liquid crystal materials etc. in the millimeter-wave region. Effectiveness of them has been experimentally verified. Less

衍射效应将传统成像显微镜的分辨率限制在所使用的辐射波长左右，但是，通过扫描近场显微镜技术可以实现低于衍射极限的亚波长分辨率。该研究项目的目标是开发新的显微镜。使用我们主要在毫米波区域开发的金属狭缝型探针的原始显微镜系统，研究了毫米波和太赫兹区域的格式及其相关技术，并进行了研究毫米波和太赫兹显微镜的新应用。我们提出并通过实验证明了毫米波区域的扫描近场各向异性显微镜，可以观察被观察物体中的电各向异性。我们还提出了一种被动显微镜格式。完全无损、非侵入性的测量，并成功地通过实验证明了其在毫米波区域的图像重建原理，以提高测量灵敏度。狭缝探针，我们提出、设计并制造了一种用于毫米波显微镜的谐振狭缝探针，在毫米波区域进行的实验表明，该谐振探针的灵敏度比传统的锥形狭缝探针高十倍以上。为了演示使用狭缝型探头的太赫兹显微镜，我们尝试优化在太赫兹频段工作的锥形狭缝探头的几何形状0.3 THz。根据优化过程得出的设计标准，通过电铸技术制造了锥形狭缝探针，我们已经验证了探针的测量射频性能与使用有限元方法获得的预测性能非常吻合。我们已将上述显微镜格式和技术应用于毫米波区域的平面介电基板、液晶材料等的表征，其有效性已得到实验验证。

项目成果

High-transmission waveguide with a small radius of curvature at a bend fabricated by use of a circular photonic crystal

使用圆形光子晶体制造的弯曲处小曲率半径的高传输波导

• 发表时间: 2005
• 期刊: Optics Letters 30
• 作者: Zhao Haizhen;Kikuo Ujihara;池上 敬一;池上 敬一;池上 敬一;N.Horiuchi
• 通讯作者: N.Horiuchi

T.Nose(能勢敏明): "Refractive Index Determination of the Nematic Liquid Crystal Materials by Using a Simple Measurement System in the Millimeter Wave Region"Conf.Digest of the 11th International Conference on Terahertz Electronics(THz2003. 84 (2003)

T.Nose（Toshiaki Nose）：“在毫米波区域使用简单测量系统测定向列液晶材料的折射率”第11届太赫兹电子学国际会议Conf.Digest（THz2003.84（2003））

T.Nose(能勢敏明): "Determination of the Insertion Loss and Refractive Index Anisotropy in the Nematic Liquid Crystal Materials Using a V-Band Trans-mission Cell"Molecular Crystals and Liquid Crystals. (発表予定). (2004)

T.Nose（Toshiaki Nose）：“使用 V 波段传输单元测定向列液晶材料中的插入损耗和折射率各向异性”分子晶体和液晶（即将发表）。

Determination of the Insertion Loss and Refractive Index Anisotropy in the Nematic Liquid Crystal Materials Using a V-Band Transmission Cell

使用 V 波段透射池测定向列液晶材料中的插入损耗和折射率各向异性

• 发表时间: 2004
• 期刊: Molecular Crystals and Liquid Crystals 409巻
• 作者: T.Nozokido(莅戸立夫);T.Nose (能勢敏明);N.Horiuchi(堀内典明);T.Nose;T.Nozokido;N.Horiuchi;T.Nose(能勢敏明);T.Nose(能勢敏明);T.Nozokido(莅戸立夫);N.Horiuchi(堀内典明);T.Nozokido(莅戸立夫);T.Nose (能勢敏明)
• 通讯作者: T.Nose (能勢敏明)

A Resonant Slit-Type Probe for Millimeter-Wave Scanning Near-Field Microscopy

用于毫米波扫描近场显微镜的谐振狭缝型探头

• 发表时间: 2004
• 期刊: IEICE Trans. Electron. E87-C・12
• 作者: Tatsuo Nozokido;Tomohiro Ohbayashi;Jongsuck Bae;Koji Mizuno
• 通讯作者: Koji Mizuno