Development of Methods to Generate Refined Beams of Neutral Free Radicals for Control of Surface Fundamental Processes

开发产生精制中性自由基束以控制表面基本过程的方法

基本信息

批准号：
14540381
负责人：
HAYASHI Keiji
金额：
$ 2.43万
依托单位：
Kanazawa Institute of Technology
依托单位国家：
日本
项目类别：
Grant-in-Aid for Scientific Research (C)
财政年份：
2002
资助国家：
日本
起止时间：
2002 至 2003
项目状态：
已结题

来源：
https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-14540381/
关键词：
Neutral Free Radical Control of Surface Fundamental Processes Negative Ion Beam Laser Photo-Excitation Ab Initio Molecular Orbital Theory Chemical Physics Molecular Design Semiconductor Device Processing 高感度その場観察手法

项目摘要

In order to further evolve quantum-functional nano-devices using metastable condensed phases, it has -become indispensable in recent years to ingeniously utilize selective surface reactions of neutral free radicals for the device processing. The problem encountered in the precise experimental study of a chemical reaction between a neutral free-radical species and a well-characterized material surface is how to supply a sufficient-flux purified beam of the momentum-controlled neutral free radicals onto the surface. The continuous supply is all the more difficult, although steady-flux continuous beams are generally more useful for thin-film growth application than pulsed ones. In order to overcome this difficulty the investigator has proposed several experimental approaches to produce steady-flux refined beams of neutral free radicals (RBNR). Two of these approaches are photo-deionization of negative ion beams (PDINIB) and photo-dissociation of energetic compound beams (PDECB).In this st … More udy, firstly, we achieved further enhancement of the rate of neutral free-radical production by improving a trial surface-processing apparatus utilizing RBNR produced by the PDINIB method. The determination of the RBNR flux was performed based on ion-current diference measurement by light intensity modulation (ICD) developed in our previous study. Then, we improved the S/N ratio and the spatial resolution of the ICD measurement system 40 and 25 times, respectively. This improved monitoring system was used for measurements of the spatial profile of the neutral-beam flux.In an application of the PDINIB method to the, doping of photo-deionized Cr atoms during the low-temperature epitaxial growth of (Al, Ga)N by a PDECB-based approach, we found a possibility that incorporation of the Cr atoms into the growing surface of the diluted magnetic semiconductor (Al, Ga, Cr)N is enhanced by the oblique irradiation. Furthermore, we succeeded in production of well-collimated neutral free-radical beams to reveal the angular-selective surface-reaction mechanism responsible for the epitaxy. Less

为了使用亚稳态凝结相进一步进化量子功能的纳米 - 驱动器，近年来，它具有 - 巧妙地利用中性自由基的选择性表面反应进行设备处理。在对中性自由基物种和特征良好的材料表面之间的化学反应的精确实验研究中遇到的问题是如何在表面上提供动量控制的中性自由基的足够升华纯化的束。连续供应更加困难，尽管稳态连续束通常比脉冲型粉刺更有用。为了克服这一困难，研究者提出了几种实验方法，以产生中性自由基（RBNR）的稳态精制光束。其中两种方法是负离子束（PDINIB）的照片销售和能量复合束的照片分解（PDECB）。在此ST上……更加糟糕，首先，我们通过通过通过pdinib产生的rbnrib产生的试验表面处理Actatatus Actatatus Actatatus faryaib fardib faryaib fary far。首先，我们进一步提高了中性自由基生产的速率。 RBNR通量的测定是根据我们先前研究中开发的光强度调制（ICD）的离子 - 电流差异测量进行的。然后，我们分别提高了ICD测量系统40和25次的S/N比和空间分辨率。 This improved monitoring system was used for measurements of the spatial profile of the neutral-beam flux.In an application of the PDINIB method to the, doping of photo-deionized Cr atoms during the low-temperature epitaxial growth of (Al, Ga)N by a PDECB-based approach, we found a possibility that incorporated Cr atoms into the growing surface of the diluted magnetic semiconductor (Al, Ga, Cr)N is Enhanced by the倾斜照射。此外，我们成功地生产了良好的中性自由基束，以揭示了造成外在的角度选择性的表面反应机制。较少的