DEVELOPMENT OF METHODS TO PRODUCE REFINED BEAMS OF NEUTRAL FREE RADICALS FOR SELECTIVE GROWTH OF METASTABLE CONDENSED PHASES

开发用于亚稳态凝聚相选择性生长的精制中性自由基束的方法

• 批准号: 16540361
• 负责人: HAYASHI Keiji
• 金额: $ 2.37万
• 依托单位: KANAZAWA INSTITUTE OF TECHNOLOGY
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (C)
• 财政年份: 2004
• 资助国家: 日本
• 起止时间: 2004 至 2005
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/en/grant/KAKENHI-PROJECT-16540361/
• 关键词: Refined Beam of Neutral Free Radical; CW Laser Beam; Negative Ion Beam; Unimolecular Energetic Dye; Chemical Physics; Quantum Design; Control of Surface Fundamental Processes; Spintronics; 中性フリーラジカルビーム; 可視CWレーザー光励起; 高精度その場観察手法; 第一原理物性シミュレーション /

In order to further evolve quantum-functional nano-devices using metastable condensed phases, it has become indispensable in recent years to ingeniously utilize selective surface reactions of neutral free radicals for the device processing. The problem encountered in the precise experimental study of a chemical reaction between a neutral free-radical species and a well- characterized material surface is how to supply a sufficient-flux purified beam of the momentum-controlled neutral free radicals onto the surface. The continuous supply is all the more difficult, although steady-flux continuous beams are generally more useful for thin-film growth application than pulsed ones. In order to overcome this difficulty the investigator has proposed several experimental approaches to produce steady-flux refined beams of neutral free radicals (RBNR). Two of these approaches are photo-deionization of negative ion beams (PDINIB) and photo-dissociation of energetic compound beams (PDECB).In this st … More udy, firstly, we achieved further enhancement of the rate of neutral free-radical production by improving a trial surface-processing apparatus utilizing RBNR produced by the PDECB and the PDINIB methods. A unique unimolecular-reaction mechanism for the photo- dissociation of the PDECB source compounds was revealed in the course of this study. Furthermore, we realized production of well-collimated hyperthermal beams of various neutral free-radical species.In an application of the PDINIB method to the doping of photo-deionized Cr atoms during the low-temperature epitaxial growth of high-quality (Al, Ga)N by a PDECB-based approach, we found a possibility that the incorporation of the Cr atoms into the growing surface of the diluted magnetic semiconductor (AI, Ga, Cr)N is enhanced by the oblique irradiation. Moreover, we successfully applied the well-collimated neutral beams of atomic Cr to elucidation of the angular- selective surface-reaction mechanism responsible for the epitaxial growth of the desirable metastable condensed phase for spintronics. Less

为了进一步发展利用亚稳态凝聚相的量子功能纳米器件，巧妙地利用中性自由基的选择性表面反应进行器件加工已成为化学反应精确实验研究中遇到的问题。中性自由基物质和良好表征的材料表面之间的一个问题是如何将动量控制的中性自由基的足够通量的纯化光束供应到表面上，尽管稳定通量连续，但连续供应更加困难。光束通常比脉冲光束更适合薄膜生长应用，为了克服这一困难，研究人员提出了几种产生稳定通量细化中性自由基光束（RBNR）的实验方法，其中两种方法是光敏光束。负离子束去离子（PDINIB）和高能复合束光解离（PDECB）。在本研究中，首先，我们通过改进试验，实现了中性自由基产生率的进一步提高。利用 PDECB 和 PDINIB 方法产生的 RBNR 表面处理装置 在本研究过程中揭示了 PDECB 源化合物光解离的独特单分子反应机制 此外，我们实现了准直超高温的生产。各种中性自由基物种的光束。在高质量低温外延生长过程中应用 PDINIB 方法掺杂光去离子 Cr 原子通过基于 PDECB 的方法，我们发现斜向照射可以增强 Cr 原子并入稀释磁性半导体 (Al, Ga, Cr)N 的生长表面。应用良好准直的原子 Cr 中性束来阐明角度选择​​性表面反应机制，该机制负责自旋电子学所需亚稳态凝聚相的外延生长。较少的

项目成果

準安定凝縮相の作り分けに用いる高品質中性フリーラジカルビームの生成〔招待論文〕

生成用于创建亚稳态凝聚相的高质量中性自由基束[特邀论文]

• 发表时间: 2004
• 期刊: 真空 47・9
• 作者: Keiji Hayashi;Hiroshi Konno;Takashi Oseki;Hideki Kojima;Takuo Kanayama;林 啓治
• 通讯作者: 林 啓治

What the Sawtooth In Situ Signal Implies about the Surface-Reaction Mechanism for Alternate-Supply OMVPE Growth of ZnSe

锯齿原位信号对交替供电 OMVPE 生长 ZnSe 的表面反应机制意味着什么

• 发表时间: 2004
• 期刊: Molecular Simulation 30・13-15
• 作者: Takuo Kanayama;Noriyoshi Omote;Satoshi Kajimoto;Keiji Hayashi;Keiji Hayashi;林 啓治;林 啓治;Keiji Hayashi
• 通讯作者: Keiji Hayashi

Development of Novel Nano-Devices and Nano-Device-Processing Methods by the Approaches of Chemical Physics, <invited review article>

通过化学物理方法开发新型纳米器件和纳米器件加工方法，<特邀评论文章>

• 发表时间: 2004
• 期刊: News Letter of the Molecular Simulation Society of Japan 23
• 作者: Keiji Hayashi;Takuo Kanayama
• 通讯作者: Takuo Kanayama

Production of a beam of Dimethylgalliumnitrene Biradicaloids for low-temperature epitaxial growth of high-quality GaN

用于低温外延生长高质量 GaN 的二甲基镓氮烯双自由基束的生产

• 期刊: Journal of Vacuum Science and Technology, A (掲載確定)
• 作者: Keiji Hayashi;Hiroshi Konno;Takashi Oseki;Hideki Kojima;Takuo Kanayama;林 啓治;Keiji Hayashi;Keiji Hayashi
• 通讯作者: Keiji Hayashi

Universal Features of Wearless Friction in Nano-Electromechanical Systems Predicted by Molecular Dynamics Simulations using a Simplified Model

使用简化模型进行分子动力学模拟预测纳米机电系统中无磨损摩擦的普遍特征

• 期刊: Modeling and Simulation in Materials Science and Engineering (掲載確定)
• 作者: Keiji Hayashi;Hiroshi Konno;Takashi Oseki;Hideki Kojima;Takuo Kanayama;林 啓治;Keiji Hayashi;Keiji Hayashi;Keiji Hayashi
• 通讯作者: Keiji Hayashi