Production and Characterization of a Refined Beam of Neutral Free Radicals for Control of Surface Fundamental Processes

用于控制表面基本过程的精制中性自由基束的生产和表征

基本信息

批准号：
10640393
负责人：
HAYASHI Keiji
金额：
$ 2.43万
依托单位：
Kanazawa Institute of Technology
依托单位国家：
日本
项目类别：
Grant-in-Aid for Scientific Research (C)
财政年份：
1998
资助国家：
日本
起止时间：
1998 至 1999
项目状态：
已结题

项目摘要

Neutral free radicals play essential roles in a variety of current semiconductor device process. In order to improve characteristics of a functional material it has become indispensabel in recent years to elaborately control even the chemical reaction pathways on the material surface responsible for the device process. The problem encountered in the experimental study of a chemical reaction between a neutral free radical and a well-defined material surface is how to sufficiently supply only the desired neutral free radical species with the desired kinetic energy. In order to overcome this difficulty the head investigator has proposed several experimental approaches to produce steady-flux refined beams of neutral free radicals (PBNR). Two of these approaches are the photo-deionization of negative ion beam (PDINIB) method and the photo-dissociation of energetic compound beam (PDECB) method.1. We have been developing a trial surface-processing apparatus utilizing PBNR produced by the PDINIB method. When we apply PBNR to thin film growth, a steady-flux beam obtained using a CW laser is more useful than a pulse beam. However, the power of an available CW laser is generally much weaker than the peak power of a pulse laser. Thus, how to enhance the photo-neutralization efficiency has been the key point to realize a practical steady-flux RBNR. We succeeded in improvement of the photo-neutralization efficiency in our trial apparatus up to more than 10% which was estimated based on the photoelectron-current measurement using a low-frequency Electro-modulation probe.2. Molecular design techniques based on post-SCF ab initio molecular orbital theory were employed to further extend applicability of the PDECB method. The electronic-theoretical criterion to discern compounds appropriate for the PDECB method as new source materials to produce more various kinds of neutral free radicals was concluded to be their nature as unimolecular metastable dye.

中性自由基在当前各种半导体器件工艺中发挥着重要作用。近年来，为了改善功能材料的特性，甚至对负责器件加工的材料表面上的化学反应路径进行精细控制也变得必不可少。在中性自由基与明确的材料表面之间的化学反应的实验研究中遇到的问题是如何仅向所需的中性自由基物种提供所需的动能。为了克服这一困难，首席研究员提出了几种实验方法来产生稳定通量的精制中性自由基束（PBNR）。其中两种方法是负离子束光去离子（PDINIB）方法和高能复合束光解离（PDECB）方法。 1．我们一直在开发一种使用通过 PDINIB 方法生产的 PBNR 的试验表面处理设备。当我们将 PBNR 应用于薄膜生长时，使用 CW 激光器获得的稳定通量光束比脉冲光束更有用。然而，可用的连续激光器的功率通常比脉冲激光器的峰值功率弱得多。因此，如何提高光中和效率成为实现实用的稳通量RBNR的关键。我们成功地将我们的试验装置的光中和效率提高了10％以上，这是根据使用低频电调制探针的光电子电流测量估计的。2．采用基于后 SCF 从头算分子轨道理论的分子设计技术进一步扩展了 PDECB 方法的适用性。识别适合 PDECB 方法作为新源材料以产生更多种类的中性自由基的化合物的电子理论标准被认为是它们作为单分子亚稳态染料的性质。