Study of real-time and precision measurement for 2-D deformation amounts of machine tool

机床二维变形量实时精密测量研究

基本信息

批准号：
11650120
负责人：
ADACHI Masaaki
金额：
$ 2.3万
依托单位：
Kanazawa University
依托单位国家：
日本
项目类别：
Grant-in-Aid for Scientific Research (C)
财政年份：
1999
资助国家：
日本
起止时间：
1999 至 2001
项目状态：
已结题

项目摘要

To develop a machine tool of high performance it is required to measure 2-D deformation amounts of it under : cutting process and then required to feedback the measured deformation data to design process of it Therefore, we studied real-time and precision measurement technique for 2-D deformation amounts of the machine tool. We had developed a technique by which a whole-field image representing the deforming amount can be measured without : phase shift techniques. Using this technique, deformation amounts of the object continuously deforming can be measured. But in step-like deformations, discontinuous deformation, usual techniques using a laser of single wavelength can not measure accurate deforming amounts, because of 2 π ambiguousties. Here, we developed a new technique, which can measure large deformations including step-like deformations, by combining the above technique with two laser beams of different wavelengths. From a multi-line beam of an argon laser 488.0nm and 514.5nm laser beams were selected and then separately introduced to two acoustic optical (AO) modulators. These AO modulators work as shutters of l/300s. After passing those, two laser beams were coupled to single-mode ; optical fibers and were conveyed to a speckle interferometer. The light reflected from the object deforming was interfered with the reference light and was focused on CCD array of the camera with the RESTART RESET mode. This camera synchronously working with the AO shutters can separately record two specklegrams which are of two wavelengths and are alternately focused on their CCD array with 0.2 ms interval. From the intensity signal changes ofspecklegrams, phase changes in each wavelength were calculated with the previously developed technique. Finally, large deformations including step-like deformations were obtained from phase differences in two wavelengths.

要开发高性能的机床，需要测量其下的2-D变形量：切割过程，然后需要反馈测得的变形数据以设计其设计过程，因此，我们研究了用于机器工具的2D变形量的实时和精确测量技术。我们已经开发了一种技术，可以通过该技术来测量代表变形量的全场图像：相移技术。使用此技术，可以测量对象连续变形的变形量。但是，在逐步变形中，不连续的变形，使用单波长的激光器通常无法测量准确的变形量，因为2π模棱两可。在这里，我们开发了一种新技术，可以通过将上述技术与两个不同波长的激光束相结合，可以测量包括阶梯变形在内的大变形。从氩激光488.0nm和514.5nm激光束的多线束中选择，然后单独引入两个声学光学（AO）调节器。这些AO调节器可作为L/300s的百叶窗。通过这些，将两个激光束耦合到单模。光纤并被传递到斑点干扰中。反射从物体变形的光被干扰了参考光，并通过重新启动重置模式集中在摄像机的CCD阵列上。该摄像机与AO百叶窗同步使用，可以单独记录两个波长的斑点，并以0.2 ms的间隔专注于其CCD阵列。从斑点格式的强度信号变化中，每个波长的相变为先前开发的技术。最后，从两个波长中的相位差异获得了包括阶梯状变形在内的大变形。