FET Moisture Sensor Devices composing of Plasma Films

由等离子薄膜组成的 FET 湿度传感器装置

• 批准号: 60550570
• 负责人: INAGAKI Norihiro
• 金额: $ 1.34万
• 依托单位: Shizuoka University
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for General Scientific Research (C)
• 财政年份: 1985
• 资助国家: 日本
• 起止时间: 1985 至 1986
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-60550570/
• 关键词: Plasma Polymerization; Thin Film; Ionic Group; Moisture Sensor; Hysterisis; Electrical Resistance; Electrical Capacitance; 相対湿度

The project started in April 1985 and completed its program in March 1987. The research project involves three programs: (1) the preparation of plasma films containing nitrogen groups as a new, moisture-sensitive material; (2) the quaternization of the plasma films containing nitrogen groups to improve the moisture sensitivity of the plasma films; (3) the application of the quaternary nitrogen-containing plasma films to moisture sensor devices.Plasma films containing nitrogen groups as a new material for moisture sensors could be formed from aminosilanes such as trimethyldimethylamine and bis(dimethylamino)methylvinylsilane. Their moisutre sensitivity could be improved by quarternization of amino groups of the plasma films. The quaternization of the plasma films by exposure to methylbromide vapor transform semi-quantitatively the amino groups into cationic groups (quaternary nitrogen groups). The moisture sensor devices composing of the quaternized plasma films could detect the relative humidities of 20 - 90 %RH with neglegible hysterisis and short response time of less than a few seconds.

该项目始于1985年4月，并于1987年3月完成了计划。该研究项目涉及三个程序：（1）制备包含氮组作为一种新的，水分敏感的材料的等离子体膜； （2）含有氮组的血浆膜的偶二膜化，以提高血浆膜的水分敏感性； （3）将含氮的血浆膜应用于水分传感器设备。包含氮基作为水分传感器的新材料的铂膜可以由三甲基二甲基甲基胺和二甲基胺（二甲基氨基）甲基硅烷甲基甲基硅烷形成。通过血浆膜的氨基群的四方面化，它们的敏感性可以提高。血浆膜通过暴露于甲基溴化物蒸气将氨基组的甲基蒸汽变成阳离子基团（第四纪氮组）。组成的季季等离子体膜组成的水分传感器设备可以检测到20-90％RH的相对湿度，并且可忽略不计的滞后时间，短响应时间少于几秒钟。

项目成果

稲垣訓宏: "高分子のビーム加工(第3章プラズマ重合による加工)" CMC, 305 (1986)

Norihiro Inagaki：“聚合物的束加工（第 3 章等离子体聚合加工）” CMC，305 (1986)

稲垣訓宏: 高分子. 35. 764-767 (1986)

稻垣典宏：聚合物 35. 764-767 (1986)

N.INAGAKI;K.SUZUKI: JOURNAL OF APPLIED POLYMER SCIENCE. 31. 2473-2481 (1986)

N.INAGAKI；K.SUZUKI：应用高分子科学杂志。

N. Inagaki: "Plasma Coatings" Surface. 23. 42-52 (1985)

N. Inagaki：“等离子涂层”表面。

稲垣訓宏: "薄膜ガイドブック(第4章プラズマコーデイング)" 理工出版, 140 (1986)

Norihiro Inagaki：“薄膜指南（第 4 章等离子编码）” Riko Publishing，140 (1986)