Fabrication of nano-porous materials by laser-enhanced mesoplasma CVD

激光增强介质CVD制备纳米多孔材料

• 批准号: 22246082
• 负责人: GOTO Takashi
• 金额: $ 24.71万
• 依托单位: Tohoku University
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (A)
• 财政年份: 2010
• 资助国家: 日本
• 起止时间: 2010 至 2012
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/en/grant/KAKENHI-PROJECT-22246082/
• 关键词: 機能性セラミックス; メソプラズマ; 化学気相析出; ナノポーラス; コーティング

A novel chemical vapor deposition (CVD) process that combines laser, microwave and electron cyclotron resonance has been developed to enhance coating process for low-temperature and high-speed coatings.

一种结合了激光、微波和电子回旋共振的新型化学气相沉积（CVD）工艺已被开发出来，以增强低温和高速涂层的涂层工艺。

项目成果

Ba_2TiO_4 and Ba_4Ti_<13>O_<30> Thick Films Prepared by Laser Chemical Vapor Deposition and Their Microstructure

激光化学气相沉积Ba_2TiO_4和Ba_4Ti_<13>O_<30>厚膜及其微观结构

• DOI: 10.4028/www.scientific.net/kem.508.199
• 发表时间: 2012
• 期刊: Key Engineering Materials
• 作者: D.Y. Guo;A. Ito;R. Tu;T. Goto
• 通讯作者: T. Goto

(006)-oriented α-Al_2O_3 films prepared in CO2-H2 atmosphere by laser chemical vapor deposition using a diode laser

利用二极管激光器在CO2-H2气氛中激光化学气相沉积制备(006)取向α-Al_2O_3薄膜

• DOI: 10.1016/j.mseb.2011.05.030
• 发表时间: 2011
• 期刊: Materials Science and Engineering B
• 作者: Y. You;A. Ito;R. Tu;T. Goto
• 通讯作者: T. Goto

Influence of laser power on the orientation and microstructure of CeO_2 films deposited on Hastelloy C276 tapes by laser chemical vapor deposition

激光功率对哈氏合金C276带材激光化学气相沉积CeO_2薄膜取向和微观结构的影响

• 发表时间: 2010
• 期刊: Applied Surface Science
• 影响因子: 6.7
• 作者: Pei Zhao;Akihiko Ito;Rong Tu;Takashi Goto
• 通讯作者: Takashi Goto

レーザーCVD法により合成したTiON膜の微細構造に与える合成条件の影響

合成条件对激光CVD法合成TiON薄膜微观结构的影响

• 发表时间: 2010
• 作者: Akihiko Ito;H.Joo;Takashi Goto
• 通讯作者: Takashi Goto

Processing and Properties of Advanced Ceramics and Composites IV

先进陶瓷及复合材料的加工与性能IV

• 发表时间: 2012
• 作者: Jitendra P. Singh;Narottam P. Bansal;Takashi Goto;Jacques Lamon;Sung R. Choi;Morsi M. Mahmoud;Guido Link
• 通讯作者: Guido Link