Development of Birefringence Analysis Code for Single Crystal Optical Elements

单晶光学元件双折射分析代码的开发

• 批准号: 24656086
• 负责人: MIYAZAKI Noriyuki
• 金额: $ 2.58万
• 依托单位: Kyoto University
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Challenging Exploratory Research
• 财政年份: 2012
• 资助国家: 日本
• 起止时间: 2012-04-01 至 2014-03-31
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/en/grant/KAKENHI-PROJECT-24656086/
• 关键词: 複屈折; 残留応力; クリープ変形; 有限要素法

Steady state creep constitutive equation was formulated using the experimental data on compressive tests under constant strain rates at elevated temperatures. Residual stress in a calcium fluoride single crystal ingot after ingot annealing was calculated by the nonlinear finite element analysis using the steady state creep constitutive equation. In the birefringence analysis, optical path difference was obtained from the residual stress. The distributions of the optical path difference obtained from the analysis were compared with those of experimental measurements. It is found that analysis results agree well with experimental measurements. Thus the subsystem for residual stress estimation was verified. The birefringence was estimated for a calcium fluoride single crystal chamber window of an ArF excimer laser light source with a wave a length of 193nm used in a semiconductor lithography system.

使用在升高温度下恒定应变速率下的压缩测试的实验数据制定了稳态蠕变组成方程。通过稳态蠕变组成型方程，通过非线性有限元分析计算氟化钙单晶铸铁钙中的残余应力。在双重分析中，从残余应力获得了光路差。将分析获得的光路差的分布与实验测量的分布进行了比较。发现分析结果与实验测量非常吻合。因此，验证了残留应力估计的子系统。估计氟化钙的氟化钙单晶腔室窗户的双重折射光源，其波段在半导体光刻系统中使用了193nm的波长。

项目成果

フッ化カルシウム単結晶の真性複屈折を考慮した光学特性解析

考虑氟化钙单晶本征双折射的光学特性分析

• 发表时间: 2012
• 作者: 北村優太;宮崎則幸;永倉直人;縄田輝彦
• 通讯作者: 縄田輝彦

Birefringence Simulations of Calcium Fluoride Single Crystal Window with Consideration of Intrinsic Birefringence

考虑本征双折射的氟化钙单晶窗的双折射模拟

• 发表时间: 2012
• 作者: Y. KITAMURA;N. MIYAZAKI;N. NAGAKURA;Y. HASHIMOTO and I. MASADA
• 通讯作者: Y. HASHIMOTO and I. MASADA

Computational Solid Mechanics Studies on Material Strengths of Single Crystals for Electronic/Optical Use

电子/光学用单晶材料强度的计算固体力学研究

• 发表时间: 2013
• 作者: 北村優太;宮崎則幸;永倉直人;橋本健宏;正田 勲;N. MIYAZAKI
• 通讯作者: N. MIYAZAKI

フッ化カルシウム単結晶の真性複屈折を考慮した複屈折シミュレーション

考虑氟化钙单晶固有双折射的双折射模拟

• 发表时间: 2013
• 期刊: 日本シミュレーション学会論文誌
• 作者: 北村優太;宮崎則幸;永倉直人;橋本健宏;正田勲
• 通讯作者: 正田勲