Functionalization of Microsystems with Coatings

微系统的涂层功能化

• 批准号: 392236626
• 负责人: Professor Dr. Jörn Wochnowski
• 金额: --
• 依托单位: National Natural Science Foundation of China
• 依托单位国家: 德国
• 项目类别: Research Grants
• 财政年份: 2018
• 资助国家: 德国
• 起止时间: 2017-12-31 至 2022-12-31
• 项目状态: 已结题
• 来源: https://gepris.dfg.de/gepris/projekt/392236626?language=en
• 关键词: Functionalization; Microsystems; Coatings

The production of customized three-dimensional structures on the micro- and nanometer scale by femtosecond laser micromachining technology has only been possible for almost a dekade of years. An important aspect is the ability to subsequently modify the structures such that certain applications in microoptics, micromechanics, microelectronics and microchemistries become possible. Such a modification often requires the introduction of metals or metal compounds into these micro- or nanosystems. Chemical vapour deposition of organometallic compounds (OMCVD) represents a coating technology, which permits the deposition of metals or metal compounds from the gas phase without damaging the often very temperature-sensitive micro- or nanostructured substrate material. The essential objective of this application is in the first step to obtain novel complex microstructures by femtosecond laser micromachining technology and functionalize these complex microstructures in the second step with interesting metals using OMCVD with regards to their use in potential new applications like in micro(nano)optics, micro(nano)mechanics, micro(nano)electronics and micro(nano)chemistries.

通过飞秒激光微加工技术生产微米级和纳米级的定制三维结构近十年才成为可能。一个重要的方面是随后修改结构的能力，使得微光学、微机械、微电子和微化学中的某些应用成为可能。这种修饰通常需要将金属或金属化合物引入到这些微米或纳米系统中。有机金属化合物化学气相沉积 (OMCVD) 是一种涂层技术，它允许从气相沉积金属或金属化合物，而不会损坏通常对温度非常敏感的微米或纳米结构基材。该应用的基本目标是第一步通过飞秒激光微加工技术获得新颖的复杂微结构，并在第二步中使用 OMCVD 使用有趣的金属对这些复杂的微结构进行功能化，以使其在微（纳米）等潜在新应用中的使用光学、微（纳米）机械、微（纳米）电子学和微（纳米）化学。