EAGER: Enhancing plasmonic mode coupling in metal insulator metal structures

EAGER：增强金属绝缘体金属结构中的等离子体模式耦合

• 批准号: 2334968
• 负责人: Shekhar Bhansali
• 金额: $ 30万
• 依托单位: Florida International University
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2023
• 资助国家: 美国
• 起止时间: 2023-10-01 至 2025-09-30
• 项目状态: 未结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=2334968&HistoricalAwards=false
• 关键词: EAGER; Enhancing; plasmonic; mode; coupling

The project aims to investigate the metal-insulator interfaces in thin film Metal-Insulator-Metal (MIM) structures for their applications in the fields of nanophotonics, biosensing, and imaging. The proposed research will be useful for the broader realms of thin film and semiconductor research. The outcome of the work will be directly applied to mass manufacturing of reliable, high-performance detectors and sensors for imaging and energy conversion applications. Although MIM-based sensors, also known as plasmonic sensors, have promising applications, their realization to real-world devices is delayed due to a lack of understanding of the fundamental properties of the MIM stack. The objective of this research is to carry out systematic studies on the properties of the metal oxide and metal-organic materials used as insulators in MIM junctions. The research described in this proposal is on the edge of interdisciplinary involving materials science, nanofabrication, and Physics. It involves almost every stage in the development of a micro-device, i.e., design, fabrication, integration, characterization testing, and optimization. The project will strive to hire a graduate student, preferably from underrepresented groups, who will be trained to learn, practice and develop boundary-spanning skills. Such skills are highly recommended for the nanotechnology workforce in the industry and academia. The training and mentoring of the graduate student on this interdisciplinary project will enable them to successfully transition to the diverse STEM workforce. The results will be published in peer-reviewed journals and have interest to diverse audiences in the field of nanotechnology, materials science, electrical engineering, and physics.The proposed research is designed to gain a broader understanding of insulating materials, which are currently being explored to gain desired MIM diode and MIM -plasmonic structure characteristics. In the past, metal–insulator interfaces have been studied; however, with the advent of the newer concept of MIIM (double insulating layer), to attain better response of the diode, there is a need to study insulator-insulator interfaces. In this proposed work, we will conduct extensive modeling and simulation, and experimental work along with detailed materials characterization using state of art techniques such as Ellipsometry, Atomic Force Microscope, Transmission Electron Microscope, Secondary Ion Mass Spectroscopy, Xray-Photoelectron Spectroscopy, X-diffractometry to understand the effect of bandgap, point defect, and oxygen transport in the interfacial layers. The new knowledge generated from these experiments will be used in mass manufacturing of high-performance sensors and detectors. The proposal aims to compare the device fabrication techniques such as vacuum-based sputtering, atomic player deposition, and ambient atmospheric pressure plasma deposition for improved fabrication. The knowledge developed from this work will be successfully disseminated in improving the quality of the MIM/ MIIM stack, thereby improving the efficiency of plasmonic sensors.This award reflects NSF's statutory mission and has been deemed worthy of support through evaluation using the Foundation's intellectual merit and broader impacts review criteria.

该项目旨在研究薄膜金属绝不能构造物金属（MIM）结构中的金属 - 绝缘子界面，以在其在纳米光子学，生物传感和成像领域中应用。拟议的研究将对薄膜和半导体研究的更广泛领域有用。这项工作的结果将直接应用于可靠，高性能检测器和传感器的大规模制造，以进行成像和能量转换应用。尽管基于MIM的传感器（也称为塑料传感器）已承诺应用应用，但由于缺乏对MIM堆栈的基本属性的了解，它们对现实世界设备的实现延迟了。这项研究的目的是进行有关金属氧化物和金属有机材料的特性的系统研究，用作MIM连接处的绝缘体。该提案中描述的研究是涉及材料科学，纳米化和物理学的跨学科的边缘。几乎涉及微设备开发的每个阶段，即设计，制造，集成，表征测试和优化。该项目将努力聘请一名研究生，优先从代表性不足的团体中聘请，他们将接受培训以学习，练习和发展边界技巧。强烈建议使用行业和学术界的纳米技术员工来使用此类技能。研究生对这个跨学科项目的培训和心理将使他们能够成功过渡到Divergent STEM劳动力。结果将在经过同行评审的期刊上发表，并对纳米技术，材料科学，电气工程和物理学领域的不同受众群体感兴趣。拟议的研究旨在获得对绝缘材料的更广泛的理解，目前正在探索这些研究，以获得获得所需的MIM二极管和中等质子型结构特征。过去，已经研究了金属 - 绝缘体界面。但是，随着MIIM较新的概念（双绝缘层）的发展，为了获得二极管的更好响应，有必要研究绝缘体 - 绝缘体界面。在这项提出的工作中，我们将使用诸如椭圆法，原子力显微镜，传输电子显微镜，二次离子质谱，X射线 - 光谱光谱谱图，X-Difffractryme，X-Diffractrysry，x-Diffractry的效应的效应的效应的效应的效应的效应的效应和杂物的相互作用的效应，并介绍了Point of point of point feffen，coipe dept of coptect sefect，我们将进行广泛的建模和模拟以及实验性工作以及详细的材料表征以及详细的材料表征。这些实验产生的新知识将用于高性能传感器和检测器的大规模制造。该提案旨在比较设备制造技术，例如基于真空的溅射，原子播放器沉积和环境大气压力等离子体沉积，以改善制造。这项工作从这项工作中获得的知识将成功传播，以提高MIM/ MIIM堆栈的质量，从而提高浆膜传感器的效率。该奖项反映了NSF的法定任务，并被认为是通过基金会的知识分子优点和更广泛影响的审查标准通过评估来评估的。