MRI: Acquisition of an Electron-Beam Lithography Tool for Research, Education and Training

MRI：获取用于研究、教育和培训的电子束光刻工具

• 批准号: 2117775
• 负责人: Liang Feng
• 金额: $ 120万
• 依托单位: University of Pennsylvania
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2021
• 资助国家: 美国
• 起止时间: 2021-09-01 至 2024-08-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=2117775&HistoricalAwards=false
• 关键词: MRI; Acquisition; Electron; Beam; Lithography

This Major Research Instrumentation (MRI) award supports the acquisition of a state-of-the-art Electron-Beam Lithography (EBL) tool to meet the nanoscale research and teaching needs of the University of Pennsylvania and its academic and industrial neighbors in the Mid-Atlantic region. The EBL instrument enables a wide range of materials and devices to be patterned on the scale of tens of nanometers. The capabilities of this advanced instrument are central to advancing research at the forefront of diverse science and engineering disciplines, including the fundamental exploration of the behavior of charge, spin, light, heat, and motion with applications in photonics and electronics, quantum computation and communication, wearable and implantable health monitoring, micro- and macro-scale energy technologies, and chemo-/bio- and motion sensing. Participating faculty members use the EBL system in educational and outreach activities to broaden participation from underrepresented groups in science and engineering. Undergraduate and graduate students in the engineering and science disciplines will gain valuable research experience and practical knowledge in nanofabrication techniques. The instrument is housed in the Quattrone Nanofabrication Facility, a multi-user research and training facility within the Singh Center for Nanotechnology at the University of Pennsylvania and home to the Mid-Atlantic Nanotechnology Hub (MANTH), an NSF National Nanotechnology Coordinated Infrastructure (NNCI) site. The EBL system is equipped with a dynamic clock for multipass exposure with high-fidelity programmable writing order control, which enables high-throughput, high placement accuracy, high-dose resolution accuracy to pattern structures with nanometer-scale features and desired complexity. The instrument is essential to developing innovative methods to structure materials into architectures for a broad range of topics: photonic and plasmonic light emitters, topological photonic and quantum logical gates, and integrated photonics for high capacity information transmission and processing; quantum materials with exotic band structures for dynamically tunable electronic, optoelectronic, and sensing devices; oxide and halide perovskites with intriguing ferro-, piezo-, and pyro-electricity and the manipulation of their nanoscale interfaces for novel structure and physical properties; large-scale ultralow weight, robust mechanical metamaterials; and 2D to 3D foldable structures of interest for micro- and nano-scale robots, resonators, and sensors. This high-impact research has applications that span computing, communication, health, food-energy-water security, national security, to human-machine interfaces.This award reflects NSF's statutory mission and has been deemed worthy of support through evaluation using the Foundation's intellectual merit and broader impacts review criteria.

这项主要的研究工具奖（MRI）奖支持获得最先进的电子束光刻（EBL）工具，以满足宾夕法尼亚大学及其学术和工业邻居的纳米级研究和教学需求。 EBL仪器使各种材料和设备可以按照数十纳米的规模进行图案。 The capabilities of this advanced instrument are central to advancing research at the forefront of diverse science and engineering disciplines, including the fundamental exploration of the behavior of charge, spin, light, heat, and motion with applications in photonics and electronics, quantum computation and communication, wearable and implantable health monitoring, micro- and macro-scale energy technologies, and chemo-/bio- and motion sensing.参与的教职员工在教育和外展活动中使用EBL系统来扩大代表性不足的科学和工程团体的参与。工程和科学学科的本科生和研究生将获得宝贵的研究经验和纳米制作技术的实践知识。该乐器位于Quattrone纳米制造设施中，这是宾夕法尼亚大学Singh纳米技术中心的多用户研究和培训设施，也是中大西洋纳米技术枢纽（Manth）的所在地，NSF国家纳米技术共同的基金会（NNCI）。 EBL系统配备了一个动态时钟，用于具有高保真可编程写作顺序控制的多种曝光，这可以使高通量，高位置精度，高剂量分辨率的准确性与具有纳米尺度特征和所需复杂性的模式结构。该仪器对于开发创新的方法至关重要，以将材料构造成各种主题的体系结构：光子和等离子光发射器，拓扑光子和量子逻辑门以及用于高容量信息传输和处理的集成光子学；具有外来带结构的量子材料，用于动态可调电子，光电和传感设备；氧化物和卤化物钙钛矿具有吸引人的铁，压电和pyro电力，以及对新结构和物理特性的纳米级接口操纵；大规模的超重重量，健壮的机械超材料；以及微型和纳米级机器人，谐振器和传感器的2D至3D可折叠结构。这项高影响力的研究具有涵盖计算，沟通，健康，食物能 - 水安全，国家安全的应用程序。该奖项反映了NSF的法定任务，并且认为值得通过基金会的知识分子优点和更广泛的影响审查标准通过评估来获得支持。