Nanomanufacturing Using Imprint Lithography and Strain Engineering

使用压印光刻和应变工程进行纳米制造

• 批准号: 1200241
• 负责人: David Gracias
• 金额: $ 29.99万
• 依托单位: Johns Hopkins University
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2012
• 资助国家: 美国
• 起止时间: 2012-08-01 至 2016-07-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=1200241&HistoricalAwards=false
• 关键词: Nanomanufacturing; Using; Imprint; Lithography; Strain

This grant supports research on a manufacturing methodology for the fabrication of large numbers of three-dimensional nanostructures and nanoparticles with precisely patterned surface compositions. The methodology leverages top-down planar patterning methods such as nanoimprint lithography and combines them with bottom-up biologically inspired self-assembly methods based on strain engineering. Experiments and theoretical models will be designed and utilized to study mechanisms to improve assembly, throughput, precision and yield of patterned polyhedral nanoparticles and curved nanostructures. Individual process steps will be optimized using statistical design of experiments to identify important factor-response relationships and the nanoparticles and nanostructures will be characterized using optical and electron microscopies and spectroscopies to probe their physical and chemical structure and properties. If successful, the creation of a cost-effective method to fabricate large numbers of patterned nanoparticles and 3D nanostructures will open up new capabilities for optics, electronics and medicine. Studies directed at the manipulation of thin film stress and surface forces at the nanoscale will lead to a deeper understanding of the behavior of materials at very small size scales. Three dimensional nanostructures composed of metals, semiconductors and polymers are important for the development of computational, metamaterial, drug delivery and sensor systems. Assessment of the reliability, efficiency and reproducibility of self-assembly methods is also necessary to enable them to be translated from the laboratory to a real-world manufacturing setting, thereby providing significantly new capabilities for nanomanufacturing. The proposed work will also contribute to training and education by the development of instructional laboratory modules, the inclusion of undergraduate students in research experiences and expose K-12 students, teachers and the public to the frontiers of science and engineering, specifically in the area of nanomanufacturing.

该赠款支持对制造方法的制造方法的研究，以制造具有精确图案表面组成的大量三维纳米结构和纳米颗粒。该方法利用自上而下的平面图案方法，例如纳米印刷光刻，并将它们与基于应变工程的自下而上的生物学启发的自组装方法相结合。实验和理论模型将被设计和利用用于研究图案化的多面体纳米颗粒和弯曲纳米结构的组装，吞吐量，精度和产率的机制。将使用实验的统计设计来优化各个过程步骤，以识别重要的因子反应关系，并将使用光学和电子显微镜以及光谱镜来探测其物理和化学结构和特性，并使用光学和电子显微镜以及光谱法对纳米颗粒和纳米结构进行表征。如果成功的话，创建一种具有成本效益的方法来制造大量图案的纳米颗粒和3D纳米结构将为光学，电子和医学提供新的功能。针对操纵薄膜应力和纳米级表面力的研究将使人们更深入地了解非常小的尺寸尺寸的材料行为。由金属，半导体和聚合物组成的三维纳米结构对于计算，超材料，药物输送和传感器系统的开发很重要。 还必须评估自组装方法的可靠性，效率和可重复性，以使它们从实验室转换为现实世界中的制造环境，从而为纳米制造提供了明显的新功能。拟议的工作还将通过开发教学实验室模块，将本科生的研究经历纳入研究经验，并将K-12学生，老师和公众曝光到科学和工程领域，尤其是在纳米制造领域的领域，从而为培训和教育做出贡献。