Thermal Transport in Diamond Thin Films: Roles of the Nanostructure and Interfaces

金刚石薄膜中的热传输：纳米结构和界面的作用

• 批准号: 1133516
• 负责人: Raj Singh
• 金额: $ 32万
• 依托单位: University of Cincinnati Main Campus
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2011
• 资助国家: 美国
• 起止时间: 2011-08-15 至 2012-04-30
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=1133516&HistoricalAwards=false
• 关键词: Thermal; Transport; Diamond; Thin; Films

PI: Raj N. Singh, Univ. of CincinnatiCBET-1133516 Heat dissipation in high performance microprocessors and power semiconductor devices is a critical challenge facing the microelectronics industry. One of the most effective ways to remove heat from integrated circuits (ICs) is to use materials with high thermal conductivity in contact with ICs. In this context, a high thermal conductivity material, especially diamond with the highest thermal conductivity of any known materials, is promising for thermal management of ICs. In particular, the objective of this research is to synthesize layered thin films of diamond in which one layer (nanocrystalline diamond-NCD) will provide smooth surfaces for lower interface resistance and the second layer (microcrystalline diamond-MCD) will result in high thermal conductivity. The approach will involve the synthesis of NCD and MCD films individually and as layered NCD/MCD films using an in-house microwave plasma enhanced chemical vapor deposition system and measuring the thermal properties using a custom-built modulated photothermal reflectance system. A novel approach of nanoseeding will be employed to reduce roughness and interface thermal resistance. Advanced materials characterization techniques will be used to identify defects in the films and relate to mean free path for phonon scattering for identifying the dominant defect controlling thermal transport in layered diamond thin films. The proposed research is significant and transformative because the results will be, to the best of our knowledge, the first comprehensive study on the effect of processing on the nanostructure, defects, and thermal transport mechanisms in NCD and layered NCD/MCD films with improved thermal properties.The proposed research has potentials for enormous payoffs because thermal management plays a critical role in several high-technology areas including optoelectronics, microelectronics, power electronics and microelectromechanical systems. In addition, with the current emphasis on conserving our limited natural resources for energy production, efficient thermal management strategies will result in direct savings in cooling costs leading to lower energy consumption and a significant positive environmental impact. An essential component of this research will be training and education of students and post docs, and dissemination of the results through publications in journals and presentations at conferences. The minority/women and high school students will be mentored and exposed to research through several programs at our university. A significant outreach to high schools is proposed through camps for teachers and students.

PI：Raj N. Singh，大学。高性能微处理器和功率半导体设备中的辛辛那方1133516的热量消散是微电子行业面临的一项关键挑战。从集成电路（IC）中去除热量的最有效方法之一是使用具有高导热率的材料与ICS接触。在这种情况下，高热电导率材料，尤其是任何已知材料的热导率最高的钻石，有望用于IC的热管理。特别是，这项研究的目的是合成钻石的分层薄膜，其中一层（纳米晶钻石-NCD）将为较低的界面电阻提供光滑的表面，而第二层（微晶钻石MCD）将导致高导热性。该方法将涉及使用内部微波血浆增强化学蒸气沉积系统的NCD和MCD膜单独合成，并作为分层的NCD/MCD膜合成，并使用定制的调制光热反射系统测量热性能。将采用一种新型的纳米糖化方法来降低粗糙度和界面热电阻。先进的材料表征技术将用于识别膜中的缺陷，并与声子散射的平均自由路径有关，以识别控制分层钻石薄膜中热传输的主要缺陷。拟议的研究具有重大和变革性，因为据我们所知，结果将是关于处理对NCD和NCD/MCD在NCD/MCD中的缺陷和热传输机制的第一个全面研究，并具有改善的热能领域，该领域具有巨大的高位，因为在高较高的情况下，具有巨大的研究，因为在高位上扮演着高度高高的角色，这是一个高高的作用，在多个高高的角色中，在多个高高的角色训练，在多个高高的角色训练，这是多数高高的，是多高的，是多高的，是多高的，是多高的，是多高的研究，这是一个高高的高位，这是一个高高的研究。微电子，电力电子和微机械系统。此外，随着当前的重点是保护我们用于能源生产的自然资源有限，有效的热管理策略将直接节省冷却成本，从而导致降低能源消耗和显着的积极环境影响。这项研究的重要组成部分是对学生和文档的培训和教育，以及通过会议期刊和演讲中的出版物传播结果。少数族裔/妇女和高中生将通过我们的大学的几个课程进行指导并接受研究。通过为教师和学生的营地提出了对高中的重大宣传。