MRI: Acquisition of a Hybrid Diamond/III-N Synthesis Cluster Tool

MRI：获得混合金刚石/III-N 合成簇工具

• 批准号: 0923215
• 负责人: Ezekiel Johnston-Halperin
• 金额: $ 42.13万
• 依托单位: Ohio State University Research Foundation -DO NOT USE
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2009
• 资助国家: 美国
• 起止时间: 2009-10-01 至 2012-09-30
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0923215&HistoricalAwards=false
• 关键词: MRI; Acquisition; Hybrid; Diamond; III

0923215Johnston-HalperinOhio State U. Res. Fdn.Technical Summary: Wide bandgap semiconductors, and in particular III-Ns and diamond, are emerging as a powerful force for innovation across a wide spectrum of science and technology. This breadth of potential is captured by the extraordinary diversity of the interdisciplinary team assembled for this proposal, with research interests ranging over 15 orders of magnitude in energy (from ~1 meV to ~ 1,000 TeV), 13 orders of magnitude in time (~ 100 fs to ~ 1 ms), and 11 orders of magnitude in length (from ~ 1 nm to ~ 10 cm). This diversity provides a unique and powerful opportunity, by optimizing a relatively modest set of material parameters: electron mobility, spin relaxation time, electron-hole recombination time and structural quality, it is possible to have a transformative impact across a truly broad front of leading edge research. This optimization will require the rapid development of these emerging materials, necessitating a tight coupling between high quality materials synthesis and precise materials characterization informed by a fundamental understanding of the science underlying these diverse applications. The collaborative network presented here, including the PIs and both on-site and off-site collaborators, posses the necessary expertise as well as the necessary infrastructure in materials characterization to exploit this unique opportunity; the only piece lacking is the appropriate infrastructure for materials synthesis. As a result, the acquisition of the hybrid diamond/III-N synthesis cluster tool proposed here will have an immediate impact on a wide spectrum of active research programs as well as providing interdisciplinary collaborations with the necessary infrastructure to successfully compete in this rapidly developing area of materials science. The proposed tool will consist of two growth chambers, one optimized for microwave-plasma chemical vapor deposition (MPCVD) of diamond films, and the other optimized for ammonia-based molecular beam epitaxy (MBE) of III-N epilayers. The chambers are linked by an air-free glove box and an ultra-high vacuum (UHV) transfer line, allowing for in situ sample transfer and high quality heterostructure growth. Finally, the diversity of this collaboration will lead directly to the training of graduate and undergraduate students who are optimally positioned to take advantage of increasingly interdisciplinary opportunities in both the academic and industrial workforce.Layman Summary: The objective of this project is to establish a materials fabrication facility to investigate the properties of new nanoscale materials based on diamond and III-N semiconductors. Wide bandgap semiconductors, and in particular III-Ns and diamond, are emerging as a powerful force for innovation across a wide spectrum of science and technology. Research in this area will benefit industries including magnetoelectronics/spintronics, high-speed electronics, solid state lighting, photovoltaics, and energy-efficient transportation. This breadth of potential is captured by the extraordinary diversity of the interdisciplinary team assembled for this proposal, with affiliations including Materials Science and Engineering, Electrical and Computer Engineering, Condensed Matter Physics and High Energy Physics and research interests ranging over 15 orders of magnitude in energy, 13 orders of magnitude in time and 11 orders of magnitude in length. For example, this variation is equivalent to temperatures from 10° C above absolute zero to 1 million times hotter than the sun, the difference in time between 1 millionth of a second and the age of the earth and sizes ranging from several atoms to the size of a cell phone. As a consequence, the acquisition of the hybrid diamond/III-N synthesis cluster tool proposed here will have an immediate impact on a wide spectrum of active research programs, laying the groundwork for fundamental discoveries and new technology and providing training for graduate and undergraduate students in emerging interdisciplinary applications of fundamental materials science research.

0923215Johnston-Halperinohio State U. FDN.技术摘要：宽带的带隙半导体，尤其是III-NS和Diamond，成为了各种科学技术的创新力量的强大力量。跨学科团队的非凡多样性占据了这一建议，研究兴趣的范围超过15个数量级（从〜1 meV到〜1,000 teV），时间（〜100 fs至〜1 ms），长度为11米（从〜1 nm 〜1 nm 〜1 10 cm 〜10 cm〜10cm）。这种多样性通过优化相对适度的材料参数提供了独特而强大的机会：电子移动性，旋转放松时间，电子孔重组时间和结构性质量，可以在前沿研究的真正广泛的方面产生变革性的影响。优化将需要快速开发这些新兴材料，高质量材料合成和精确材料之间的必要耦合，这是通过对这些潜水员应用的基本科学的基本理解所带来的。这里介绍的合作网络，包括PIS以及现场和现场合作者，都具有必要的专业知识以及材料表征中必要的基础架构，以利用这一独特的机会；唯一缺乏的作品是材料合成的适当基础设施。结果，此处提出的Hybrid Diamond/III-N合成集群工具的获取将对广泛的活跃研究计划产生直接影响，并提供与必要的基础设施的跨学科合作，以成功地在这种快速发展的材料科学领域中成功竞争。该提出的工具将由两个生长室组成，一个用于钻石膜的微波 - 血浆化学蒸气沉积（MPCVD），另一个针对III-N EPILAYER的氨基束的外观（MBE）的分子束支配（MBE）进行了优化。腔室由无气杂志盒和超高真空（UHV）转移线连接，从而可以原位样品转移和高质量的异质结构生长。最后，这项合作的多样性将直接导致对学术和工业劳动力中越来越多地利用越来越多的跨学科机会的研究生和本科生的培训。Layman摘要：该项目的目的是建立一个物质制造设施，以研究基于Diamons和III-N-N-N-N-NEMOCODERS的新Nanoscale材料的物业。宽阔的带隙半导体，尤其是III-NS和Diamond，正成为各种科学技术的创新力量的强大力量。该领域的研究将使包括磁性/旋转型，高速电子，固态照明，光伏和节能运输等行业有益于行业。跨学科团队的非凡多样性为该提案组成，包括材料科学和工程，电气和计算机工程，电气和计算机工程，凝结物理学以及高能量物理学以及高能量物理学和研究兴趣在15个数量级以上的能源范围内，时间为13个数量级，而在时间上增加了11个级数。例如，这种变化相当于比太阳高于绝对零高至100万倍的温度，地球年龄和地球年龄的100万之间的时间差，尺寸从几个原子到手机的大小不等。结果，此处提出的混合钻石/III-N合成集群工具的获取将对广泛的活跃研究计划产生直接影响，为基本发现和新技术奠定了基础，并为研究生和培训提供了在新兴的学生和本科生中的培训。