Tribologically-Enhanced Encapsulated Microball Bearings for Reduced Friction and Wear in High-Performance Rotary Microactuators and PowerMEMS Devices

摩擦学增强型封装微球轴承可减少高性能旋转微执行器和 PowerMEMS 设备中的摩擦和磨损

• 批准号: 0901411
• 负责人: Reza Ghodssi
• 金额: $ 33万
• 依托单位: University of Maryland, College Park
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2009
• 资助国家: 美国
• 起止时间: 2009-07-01 至 2013-06-30
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0901411&HistoricalAwards=false
• 关键词: Tribologically; Enhanced; Encapsulated; Microball; Bearings

Tribologically-Enhanced Encapsulated Microball Bearings for Reduced Friction and Wear in High-Performance Rotary Microactuators and PowerMEMS DevicesProposal Number: 0901411University of Maryland College ParkPI: Reza Ghodssi, Co-PI: Matthew McCarthyAbstractSummaryThe objective of this work is to develop high-performance rotary ball bearings for Microelectromechanical Systems (MEMS) using tribologically-enhanced thin-film coatings. Particular emphasis will be on the design, fabrication, and experimental characterization of UltraNanoCrystalline Diamond (UNCD), Silicon Carbide (SiC), Titanium Nitride (TiN), and Boron Nitride (BN) films as hard-coatings to reduce friction and wear in microscale rolling contacts. The results of this will be implemented in a low-friction, low-wear, and long-lifecycle microball bearing for rotary microactuators and PowerMEMS devices. These support mechanisms will be capable of continuous operation for speeds in excess of 100,000rpm and provide the stability and reliability necessary for the realization of high-speed micro-turbogenerators as well as accurate rotary positioning systems for directional sensors.Intellectual Merits The work proposed here constitutes fundamental research into the science and engineering of microfabricated ball bearing support mechanism including the effects of hard coatings to reduce friction and wear. It will specifically lead to reliable support mechanisms for use within various rotary MEMS devices. The design and engineering of MEMS-fabricated ball bearings using hard-coatings will allow the realization of these technologies for high-performance applications. The in-situ experimental investigation proposed here will comprehensively address the effects of materials, loading, and operation on microfabricated rotary bearings. This will be achieved through (1) bearing design and fabrication using thin-film coatings, (2) in-situ experimental characterization using integrated microturbine actuation, and (3) implementation of optimized bearings in microfabricated rotary actuators and PowerMEMS devices.Broader Impacts Research This technology will yield a low-friction/wear microball support mechanism necessary for the realization of several high-performance rotary micromachines. Ongoing research is being conducted on the development of compact micro-turbogenerators for small-scale cost-effective power generation and rotary actuator platforms for directional sensor systems. The reliable demonstration of such devices over long life-cycles would have a substantial impact on distributed autonomous systems such as micro-air-vehicles, portable power systems, and sensor networks.EducationThis research will complement the university?s well-established research and education programs in materials science and MEMS. The interdisciplinary scope of the proposed research covers three major areas: Materials, Electrical, and Mechanical Engineering. The project offers an excellent opportunity to engage senior undergraduate and graduate students in masters and doctoral-level research on materials engineering and its broader impact on the MEMS field. The PI has developed a two-semester multidisciplinary graduate-level course with an active laboratory component (Design, Fabrication, and Testing of MEMS and Microsystems). The proposed research will strengthen ongoing work developing ball-bearing supported micromachines in the PI?s group, the MEMS Sensors and Actuators Laboratory (MSAL), as well as the Maryland Nanocenter. The PI supervises a number of undergraduate and graduate students, the majority of whom are US citizens. The co-PI is a former NSF GK-12 Teaching Fellow, and currently a postdoctoral researcher. These activities will directly impact the nature of the interdisciplinary research curriculum, recruitment of outstanding students, and dissemination of knowledge through conferences and refereed journal publication

用于减少高性能旋转微执行器和 PowerMEMS 器件中摩擦和磨损的摩擦学增强型封装微球轴承提案编号：0901411 马里兰大学学院公园 PI：Reza Ghodssi，联合 PI：Matthew McCarthy 摘要摘要这项工作的目标是开发高性能旋转球轴承用于微机电系统 (MEMS) 使用摩擦学增强薄膜涂层。特别重点是超纳米晶金刚石 (UNCD)、碳化硅 (SiC)、氮化钛 (TiN) 和氮化硼 (BN) 薄膜的设计、制造和实验表征，作为硬质涂层，以减少微尺度的摩擦和磨损滚动接触。其成果将应用于旋转微执行器和 PowerMEMS 设备的低摩擦、低磨损、长寿命的微球轴承中。这些支撑机构将能够以超过 100,000rpm 的速度连续运行，并提供实现高速微型涡轮发电机以及方向传感器的精确旋转定位系统所需的稳定性和可靠性。 智力优点 这里提出的工作构成了微加工球轴承支撑机构的科学和工程基础研究，包括硬质涂层对减少摩擦和磨损的影响。它将特别导致在各种旋转 MEMS 设备中使用可靠的支撑机制。使用硬涂层的 MEMS 制造的球轴承的设计和工程将使这些技术能够实现高性能应用。这里提出的现场实验研究将全面解决材料、载荷和操作对微制造旋转轴承的影响。这将通过以下方式实现：(1) 使用薄膜涂层进行轴承设计和制造，(2) 使用集成微型涡轮驱动进行现场实验表征，以及 (3) 在微型旋转执行器和 PowerMEMS 设备中实施优化轴承。 更广泛的影响研究该技术将产生一种低摩擦/磨损的微球支撑机构，这是实现多种高性能旋转微型机器所必需的。目前正在研究开发用于小型经济高效发电的紧凑型微型涡轮发电机以及用于方向传感器系统的旋转执行器平台。此类设备在长生命周期内的可靠演示将对微型飞行器、便携式电源系统和传感器网络等分布式自主系统产生重大影响。教育这项研究将补充该大学完善的研究和教育材料科学和 MEMS 项目。拟议研究的跨学科范围涵盖三个主要领域：材料、电气和机械工程。该项目提供了一个绝佳的机会，让高年级本科生和研究生参与材料工程及其对 MEMS 领域更广泛影响的硕士和博士级研究。 PI 开发了一个为期两个学期的多学科研究生水平课程，其中包括一个活跃的实验室部分（MEMS 和微系统的设计、制造和测试）。拟议的研究将加强 PI 小组、MEMS 传感器和执行器实验室 (MSAL) 以及马里兰纳米中心正在进行的滚珠轴承支持微型机器的开发工作。 PI 管理着许多本科生和研究生，其中大多数是美国公民。联合 PI 是前 NSF GK-12 教学研究员，目前是博士后研究员。这些活动将直接影响跨学科研究课程的性质、优秀学生的招收以及通过会议和参考期刊出版传播知识