SGER: Integrated Indium Phosphide Based Microsystem for Chemical Sensing

SGER：用于化学传感的集成磷化铟微系统

• 批准号: 0841058
• 负责人: Reza Ghodssi
• 金额: --
• 依托单位: University of Maryland, College Park
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2008
• 资助国家: 美国
• 起止时间: 2008-08-01 至 2009-10-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0841058&HistoricalAwards=false
• 关键词: SGER; Integrated; Indium; Phosphide; Based

SummaryObjective:The objective of this effort is to investigate the feasibility of a highly sensitive microsystem for chemical sensing based on an indium phosphide substrate.Intellectual Merit: This proposal explores the possibility of optical detection of chemicals using an integrated system on an indium phosphide substrate. It will include a laser source, integrated directly with a microcantilever and photodetectors, that will permit the precise tracking of the resonant frequency of the cantilever. Functionalized coatings on the cantilever will be used to absorb chemicals from the environment and this interaction will change the mass, and consequently, the resonant frequency, of the cantilever. The system implementation will include a servo-control circuit. The integration of a micromechanical and photonic system is expected to yield very high sensitivity.Broader Impact: This project has substantial interdisciplinary scope, encompassing photonics, micromechanics, and chemical sensing. In addition to its research outcome, it promises to be a good vehicle for teaching students at both undergraduate and graduate levels. The research results will be disseminated through classroom instruction and workshops.

摘要目的：这项工作的目的是研究基于磷化铟基板的化学传感高灵敏度微系统的可行性。智力优点：该提案探索了使用磷化铟基板上的集成系统进行光学检测化学物质的可能性。 它将包括一个直接与微悬臂梁和光电探测器集成的激光源，这将允许精确跟踪悬臂梁的谐振频率。 悬臂梁上的功能化涂层将用于吸收环境中的化学物质，这种相互作用将改变悬臂梁的质量，从而改变谐振频率。 该系统实施将包括伺服控制电路。 微机械和光子系统的集成预计将产生非常高的灵敏度。更广泛的影响：该项目具有广泛的跨学科范围，包括光子学、微机械和化学传感。 除了其研究成果外，它还有望成为本科生和研究生教学的良好工具。 研究结果将通过课堂教学和研讨会传播。