Nanowire-Based High-Frequency, High-Q Electromechanical Resonators

基于纳米线的高频、高 Q 机电谐振器

• 批准号: 0804863
• 负责人: Wei Lu
• 金额: $ 30万
• 依托单位: Regents of the University of Michigan - Ann Arbor
• 依托单位国家: 美国
• 项目类别: Continuing Grant
• 财政年份: 2008
• 资助国家: 美国
• 起止时间: 2008-07-01 至 2012-06-30
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0804863&HistoricalAwards=false
• 关键词: Nanowire; Based; Frequency; Electromechanical; Resonators

ABSTRACT:The objective of this research is to develop high-frequency, high-quality factor (Q) nano-electromechanical resonators and integrated resonator/sensor systems. The approach is to build flexural-mode electromechanical resonators using chemically synthesized nanowires, either after growth or through a controlled direct-growth method. The nanowire resonator system offers both GHz operation potential and reduced internal and clamping losses due to its small size, single-crystalline material structure, smooth surfaces and a large aspect ratio.Intellectual Merits: A systematic approach to improve the quality factor and the resonance frequency will be carried out through carefully designed material studies, device fabrication and analysis. Integration of nanowire resonators with other on-chip components will be explored through selective growth of nanowire bridges. Quantum-limited position measurements will be attempted by coupling a GHz resonator with an electrical transducer. The high-frequency, high-Q system will be suitable for a number of applications including ultra-sensitive mass, force and position detection, and open new frontiers such as mechanical quantum states and entanglement of the mechanical/electrical degrees of freedom. Broader Impacts: This program will provide educational and training opportunities for at least one graduate and one undergraduate student at any given year, with an emphasis on recruiting students from underrepresented groups. Knowledge and techniques developed during research will be incorporated into a new, comprehensive undergraduate course and disseminated to the general public through publications, technology transfer, websites and a textbook. Students in inner-city, high-need school districts will also be engaged through a research experience for teaches program, high-school class visits and online exhibits.

摘要：这项研究的目的是开发高频，高质量因子（Q）纳米电机机电谐振器和集成的谐振器/传感器系统。该方法是在生长或通过受控的直接增长方法后使用化学合成的纳米线构建弯曲模式机电谐振器。纳米线谐振器系统既具有GHz操作电位，也提供了减少的内部和夹紧损失，这是由于其尺寸小，单晶材料结构，光滑的表面和较大的纵横比。智能优点：一种系统的方法来提高质量因素，并通过精心设计的材料研究，设备制造和分析来实现恢复频率。纳米线谐振器与其他片上组件的集成将通过选择性的纳米桥的选择性探索。通过将GHz谐振器与电换能器耦合，将尝试尝试量子限制的位置测量值。高频，高Q系统将适用于许多应用，包括超敏感的质量，力和位置检测以及开放的新边界，例如机械量子状态和机械/电气自由度的纠缠。更广泛的影响：该计划将在任何一年中为至少一名研究生和一名本科生提供教育和培训机会，重点是招募来自代表性不足的团体的学生。研究期间开发的知识和技术将纳入新的全面的本科课程中，并通过出版物，技术转移，网站和教科书传播给公众。在市中心，高需求学区的学生也将通过研究教学计划，高中班访问和在线展览的研究经验。