Electronic Sensitive Skin with Integrated Tactile, Infrared and Flow Sensors on Flexible Substrates

柔性基板上集成触觉、红外和流量传感器的电子敏感皮肤

• 批准号: 0401148
• 负责人: Zeynep Celik-Butler
• 金额: $ 21.14万
• 依托单位: University of Texas at Arlington
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2004
• 资助国家: 美国
• 起止时间: 2004-08-15 至 2008-07-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0401148&HistoricalAwards=false
• 关键词: Electronic; Sensitive; Skin; Integrated; Tactile

ABSTRACTSensitive skin is a large area, flexible array of sensors with data processing capabilities. The microsensors are integrated to give the capability of sensing several stimuli, mimicking a real skin, including but not limited to temperature, touch, and flow. The objectives of this research are to integrate thermometers, micromachined infrared detectors, and pressure sensors onto flexible substrates such as commercially available Kapton as well as custom made inorganic polymers (poly (methylphenylphosphazene), [Me(Ph)P=N]n, PMPP) developed under the current NSF grant. In addition, a feasibility study will be done to incorporate flow sensors. The use of multi-sensory arrays is particularly attractive to robotics applications where operators would like to have a "human-like" sense of the environment. Micromachined, distributed multi-sensory arrays will be fabricated on the flexible polymer substrates. The mechanical, electrical and optical sensory performance of the micromachined sensors will be measured. To maintain low cost, it will be important to utilize standard Si fabrication equipment. This investigation will employ standard micromachining techniques with polymer-coated wafers to allow standard fabrication equipment to be employed. Upon completion of the fabrication, the polymer will be released from the wafers to provide a flexible substrate. The outcome of this research is NOT a product that would replace human skin, but a product that would emulate the functions of a human skin on inanimate objects such as robots, aircraft, and other macro- and micro-scale machines.Intellectual Merit: This is the first known effort to build micromachined, integrated, multi-sensory arrays on flexible substrates. Challenges include thermal budget restrictions of the underlying polymer substrates, mechanical integrity of the sensors on the flexible substrates, surface roughness of these substrates, signal routing, adhesion of metals to polyimide substrates, cross-talk between sensors and power supply requirements. A primary consideration in the development of flexible electronic devices is adhesion of circuit components to the flexible substrate. This is dependent upon having a substrate surface that is chemically modifiable. The science and technology developed through this investigation will enable a broad class of distributed micromachined sensors that may be produced on flexible substrates. The multisensory arrays developed in this investigation represent a step towards the development of a sensitive skin that will also include signal processing electronics. The IR microsensors will employ microbolometers that are capable of detecting broadband infrared radiation extending into the far-infrared. Piezoresistive tactile sensors with sensitivity greater than the human skin will be developed. The tactile sensors will respond to the touch-pressure exerted on the substrate as well as stress developed by bending the substrate. Broader Impacts: One of the PIs will participate in the Advanced Summer Institute for Educators that provides training opportunities for high school math and science teachers. In addition, 4th grade and 9th grade students in an Elementary and High School have been targeted for in-class presentations on flexible electronics by the research group. The activities described in this proposal, especially the applications as an artificial skin, would be attractive to youth and can be used to recruit students to science and engineering.

摘要敏感的皮肤是具有数据处理功能的柔性传感器阵列。将微传感器集成到能够感测几种刺激的能力，模仿真实的皮肤，包括但不限于温度，触摸和流动。这项研究的目的是将温度计，微机械红外探测器和压力传感器整合到柔性底物上，例如市售的Kapton以及定制的无机聚合物（甲基苯基磷酸），[ME（ME（pH）P = N] N，PMPP），根据当前NSF拨款而开发。此外，将进行可行性研究以结合流动传感器。多感觉阵列的使用对机器人应用特别有吸引力，在该应用程序中，操作员希望对环境具有“人类般”感。微机械，分布式多感官阵列将在柔性聚合物底物上制造。将测量微机械传感器的机械，电和光学感官性能。为了保持低成本，使用标准的SI制造设备很重要。这项研究将使用涂有聚合物的晶片的标准微加工技术，以允许使用标准的制造设备。制造完成后，聚合物将从晶片中释放出来，以提供柔性的底物。这项研究的结果不是可以取代人类皮肤的产品，而是一种可以模仿人类皮肤在无生命物体（例如机器人，飞机和其他宏观和微型机器）功能的产品。IntlectualFertit：这是构建微电，集成的，多体性阵列在柔性底物上的首次已知努力。挑战包括基础聚合物基板的热预算限制，传感器在柔性底物上的机械完整性，这些底物的表面粗糙度，信号路由，金属对聚酰亚胺基板的粘附，传感器之间的交叉词和电源需求之间的串扰。柔性电子设备开发的主要考虑因素是电路组件与柔性基板的粘附。这取决于具有化学修改的底物表面。通过这项调查开发的科学和技术将使可能在柔性底物上产生的大量分布式微机械传感器能够。在本研究中开发的多感官阵列代表了朝着敏感皮肤开发的步骤，该阵列还将包括信号处理电子设备。红外微传感器将采用能够检测宽带红外辐射延伸到远红外的微型光压计。将开发具有比人皮肤更高灵敏度的压电触觉传感器。触觉传感器将对底物上施加的触摸压力以及弯曲底物产生的压力做出反应。更广泛的影响：其中一个PI将参加高级夏季教育研究所，为高中数学和科学教师提供培训机会。 此外，研究小组还针对一所小学和高中的四年级和9年级学生在柔性电子学上的一流演讲。本提案中描述的活动，尤其是作为人造皮肤的应用将对青年人有吸引力，可用于招募学生进入科学和工程学。