SGER: Explore Feasibility of a Novel Nano Mechanical Machining System-on-a-Chip (SOAC) for Nano Manufacturing

SGER：探索用于纳米制造的新型纳米机械加工片上系统 (SOAC) 的可行性

• 批准号: 0236465
• 负责人: Ajay Malshe
• 金额: $ 6.27万
• 依托单位: University of Arkansas
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2002
• 资助国家: 美国
• 起止时间: 2002-10-01 至 2003-09-30
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0236465&HistoricalAwards=false
• 关键词: SGER; Explore; Feasibility; Novel; Nano

The objective of this Small Grant for Exploratory Research (SGER) is to explore feasibility to design, fabricate and test a nano mechanical machining (mechanism) system-on-a-chip (tool, tool holder and their actuation), a dynamic scanning probe machining tool, with intention of performing operations such as drilling, milling, deburring, etc. This novel system-on-a-chip (SOAC) will be adaptable to scanning probe microscope (SPM) operation platform. Another unique feature of this innovation is that it will allow rotational motion to the nano tool tip, unlike mechanisms demonstrated by others, to realize new boundaries of traditional macro mechanical machine in nano paradigm. In this exploratory phase, this mechanism will be fabricated using well-established micro electro mechanical system (MEMS) platform through silicon multilayer fabrication. This project covers the research and education theme on "Manufacturing processes at Nanoscale".One of the most important areas which will impact all sections of nano technology, is the design and development of "tools" for nano fabrication, machining and manufacturing. The tools for nano machining can be classified in various ways, but predominantly one can classify them as (1) tools for wet versus dry process, (2) natural versus intentional organization, and (3) bottom-up or top-down fabrication. In the proposed project, we intend to pursue dry processing for intentional organization in top-down fabrication approach. Based upon today's direction of the field the findings will immediately impact semiconductor, optical, bio, pharmaceutical, etc. applications. This project will involve ethnic as well as gender minority undergraduate and graduate students in leading research projects through programs such as Carver Project, REU, etc. The PI would continue the proactive involvement through this project for bigger and better success by retaining and training minority students for higher education in this exciting and emerging area. Further, through the education task the PI will provide training to student on the project, introduce a new interdisciplinary class on Nanomanufacturing Processes at graduate level, and reach out through lab tours and creating an informative website "Nanotechnology for Dummies" for non-technical community and high school students. Moreover, nano science and engineering, particularly "nano manufacturing" is one of the major areas of emphasis for the state of Arkansas. The fields of biotechnology, electronics along with the traditional manufacturing are the major growing sectors in the state. On this background, the proposed subject area of research is of urgent academic and technological importance to many small hi-tech industries. The success of this seed project will enable PI to further establish a complete research and education program in the field of nanomanufacturing.

这项小额探索性研究资助 (SGER) 的目的是探索设计、制造和测试纳米机械加工（机构）片上系统（刀具、刀架及其致动）、动态扫描探针的可行性加工工具，旨在执行钻孔、铣削、去毛刺等操作。这种新型片上系统（SOAC）将适用于扫描探针显微镜（SPM）操作平台。这项创新的另一个独特之处在于，与其他人演示的机制不同，它将允许纳米工具尖端进行旋转运动，以实现纳米范式中传统宏观机械机器的新边界。在此探索阶段，该机构将使用成熟的微机电系统（MEMS）平台通过硅多层制造来制造。该项目涵盖“纳米级制造过程”的研究和教育主题。影响纳米技术所有领域的最重要领域之一是纳米制造、加工和制造“工具”的设计和开发。纳米加工工具可以通过多种方式进行分类，但主要可以将其分类为（1）湿法加工工具与干法加工工具，（2）自然组织与有意组织，以及（3）自下而上或自上而下制造。在拟议的项目中，我们打算采用自上而下的制造方法进行有意组织的干处理。 根据当今该领域的发展方向，这些发现将立即影响半导体、光学、生物、制药等应用。该项目将通过卡弗项目、REU 等项目让少数族裔和性别少数本科生和研究生参与主导研究项目。PI 将继续积极参与该项目，通过留住和培训少数族裔学生取得更大更好的成功在这个令人兴奋的新兴领域接受高等教育。此外，通过教育任务，PI 将为学生提供有关该项目的培训，在研究生阶段引入关于纳米制造过程的新跨学科课程，并通过实验室参观和为非技术社区创建一个信息丰富的网站“纳米技术傻瓜”和高中生。此外，纳米科学与工程，特别是“纳米制造”是阿肯色州的重点发展领域之一。生物技术、电子领域以及传统制造业是该州的主要增长部门。在此背景下，拟议的研究主题领域对于许多小型高科技产业具有紧迫的学术和技术重要性。该种子项目的成功将使PI进一步在纳米制造领域建立完整的研究和教育计划。