RIA: New high moment soft magnetic multilayers & their applications in sub-half micron track width magnetic recording

RIA：新型高磁矩软磁多层膜

• 批准号: 9409805
• 负责人: Shan Wang
• 金额: $ 10万
• 依托单位: Stanford University
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 1994
• 资助国家: 美国
• 起止时间: 1994-07-01 至 1997-06-30
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=9409805&HistoricalAwards=false
• 关键词: RIA; New; moment; soft; magnetic

9409805 Wang Magnetic disk drives are the dominant mass storage devices for computers. In order to meet the storage demand for image processing, massively parallel computing and multimedia, the areal recording densities of the disk drives need to be raised from currently 200 Megabits/inch2 to beyond 10 Gigabits/inch2, an increase of about two orders of magnitude. To reach this goal, a key technology for designing and fabricating high moment, submicron trackwidth, magnetic write heads are required to record digital bits with a size of about 0.1 um x 0.5 um on high coercivity magnetic disks which cannot be recorded with conventional Pemalloy magnetic heads. The objectives and methods of the project are as follows; 1) Grow giant moment a" phase Fe16N2 films on ceramic substrates by reactively sputtering and Fe target in Ar + N2 + NH3 plasma, with controlled in-situ substrate temperatures. The effects of growth parameters and substrates on the phases, microstructures, and magnetic properties of the films obtained will be explored. 2) Fabricate magnetic write heads with the new material, and with a trackwidth 0.5 um. Electron-beam lithography and reactive ion beam etching will be used to fabricate submicron magnetic structures. 3) Investigate magnetic domain structures of such heads with magnetic force microscopy (MFM) and scanning electron microscopy with spin analysis (SEMPA). Recording performance will be evaluated with industrial collaboration. ***

9409805王磁盘驱动器是计算机的主要质量存储设备。 为了满足图像处理，大量并联计算和多媒体的存储需求，需要将磁盘驱动器的面积记录密度从目前的200兆比特/英寸增加到10吉比特/英寸以上/英寸2，这增加了约两个学位。 为了实现这一目标，一项用于设计和制造高力矩的关键技术，亚微米轨迹宽，需要磁性写头才能记录在高强化磁盘上大小约0.1 um x 0.5 UM的数字钻头，而传统的pemalloy磁头无法记录。 该项目的目标和方法如下； 1）生长巨大的力矩，通过在AR + N2 + NH3血浆中的反应溅射和Fe靶标在陶瓷底物上的“ FE16N2膜”，具有受控的位于原位的底物温度。生长参数和底物对相位，微结构和磁性材料的效果的效果以及构造的材料的效果。 UM。将使用电子束射击和反应性离子束蚀刻，以研究具有磁力显微镜（MFM）的磁性域结构。