Micrometer-sized photodetectors for selective-area transferring and integration on a heterogeneous substrate

微米级光电探测器，用于异质基板上的选择性区域转移和集成

• 批准号: 531859-2018
• 负责人: Ban, Dayan
• 金额: $ 7.29万
• 依托单位: University of Waterloo
• 依托单位国家: 加拿大
• 项目类别: Collaborative Research and Development Grants
• 财政年份: 2021
• 资助国家: 加拿大
• 起止时间: 2021-01-01 至 2022-12-31
• 项目状态: 已结题
• 来源: https://www.nserc-crsng.gc.ca/ase-oro/Details-Detailles_eng.asp?id=719720
• 关键词: Micrometer; sized; photodetectors; selective; area

The key features of next-generation display technologies may include high optical efficiency, high spatial resolution, high reliability, energy saving as well as the capability of environment optical sensing. Among them, the real-time optical sensing would not only add new functionalities to the devices, but also enable the displays to actively respond to any changes in surroundings and react accordingly, leading to the realization of a completely new concept - smart display. Nevertheless, none of the commercially-available display technologies has integrated in-situ optical sensing capabilities. The reason is simple, the device top surface area is fully occupied by the two-dimensional heavily-packed light-emitting RGB (red/green/blue) array, leaving no room for any other components. VueReal Technologies Inc. has been collaborating with the PI on the development of micrometer-sized light emitting diode (µ-LED)-based displays. The collaboration yields the demonstration of record-breaking µ-LED-based displays and enables the company to attract more than 18 million dollars investment fund. By significantly shrinking the size of each light-emitting pixel in such µ-LED-based displays, device surface area is freed up, yielding a new degree of freedom to integrate different optical components. Based on the R&D progress in the past three years, the PI and VueReal will continue to work on the development of micrometer-sized photodetector (micro-PD) technologies. The research objectives of this project are 1) To develop a fabrication strategy and an optimized recipe for fabricating microPDs, 2) To characterize the fabricated micro-PD devices, 3) To optimize the performance of the fabricated devices, in particular, to suppress the leakage current and to enhance signal-to-noise ratio and, 4) To develop a detaching and transferring strategy that can integrate micro-PDs with µ-LEDs on a same substrate. This project will provide an excellent opportunity for highly qualified personal (HQP) to gain hands-on experience with device fabrication, characterization, optical detection and display technologies. This project will also provide the much urgently-needed expertise and facilities at the University of Waterloo to the industry partner.

下一代显示技术的关键特征可能包括高光学效率、高空间分辨率、高可靠性、节能以及光学环境传感能力，其中实时光学传感不仅会增加新的功能。不仅如此，显示器还能够主动响应周围环境的任何变化并做出相应的反应，从而实现了一个全新的概念——智能显示。然而，目前商用的显示技术还没有集成原位光学传感。原因很简单，设备顶面。该区域完全被二维密集的发光 RGB（红/绿/蓝）阵列占据，没有为任何其他组件留下空间。VueReal Technologies Inc. 一直在与 PI 合作开发微米尺寸的组件。此次合作展示了创纪录的基于 µ-LED 的显示器，并通过大幅缩小每个显示器的尺寸，吸引了超过 1800 万美元的投资资金。基于过去三年的研发进展，PI 和 VueReal 将继续合作。该项目的研究目标是：1) 开发制造 microPD 的制造策略和优化配方，2) 表征所制造的光电探测器。微PD器件，3）优化制造器件的性能，特别是抑制漏电流并提高信噪比，4）开发可集成微PD的分离和转移策略该项目将为高素质人员 (HQP) 提供绝佳的机会，让他们获得器件制造、表征、光学检测和显示技术方面的实践经验。所需的专业知识和设施滑铁卢大学成为行业合作伙伴。