Visible light integrated photonics on silicon for mixed reality 3D displays

用于混合现实 3D 显示的可见光硅集成光子学

• 批准号: RGPIN-2018-06491
• 负责人: Poon, Joyce
• 金额: $ 4.01万
• 依托单位: University of Toronto
• 依托单位国家: 加拿大
• 项目类别: Discovery Grants Program - Individual
• 财政年份: 2020
• 资助国家: 加拿大
• 起止时间: 2020-01-01 至 2021-12-31
• 项目状态: 已结题
• 来源: https://www.nserc-crsng.gc.ca/ase-oro/Details-Detailles_eng.asp?id=713628
• 关键词: Visible; light; integrated; photonics; silicon

The past decade has witnessed the dramatic maturation of silicon (Si) photonics a technology which forms photonic micro/nano-scale devices and photonic integrated circuits on Si substrates using the manufacturing infrastructure of complementary metal oxide semiconductor electronics. The large Si substrates (typically 8” or 12” in diameter) and wafer-scale microelectronic packaging lead to high production volumes that potentially reduce the cost of electro-optical modules. At present, Si photonic technologies, including the integrated waveguide platforms, microfabrication flows, integrated devices, and microsystems, have been developed for the short-wave infrared wavelength range (near 1.3 or 1.5 um) for fiber-optic communications. The proposed research program will redefine foundry Si integrated photonics beyond its conventional form to address new applications in the visible wavelength range (around 450-650 nm). In particular, we will investigate visible light photonic integrated circuits (VISPICs) for miniaturized three-dimensional (3D) head-mounted displays (HMDs) for mixed reality (MR) headsets. MR HMDs are an emerging form of wearable computers that seek to create immersive and intuitive human-computer interfaces. However, today's MR HMDs are bulky and non-ergonomic, preventing their widespread adoption. The performance of and experience that can be provided by MR HMDs are largely limited by today's display technology. A radically different approach to HMDs that can be significantly more compact, lightweight, and bright, with a wide angle and large depth of focus is needed. To address this challenge, we will develop a multi-layer visible light photonic platform on Si to implement novel optical phased array beam scanners for near-eye scanned pixel displays. The photonic platform will contain several moderate refractive index contrast waveguide layers in silicon nitride (SiN) and silicon oxynitride (SiON) with silica cladding layers atop Si. It will be realized on 8” Si substrates in collaboration with a foundry partner. A new 3D architecture for tunable optical phased arrays will be investigated to decrease the array element pitch to suppress radiation side lobes. This research will build upon the remarkable success our group has had in infrared light multi-layer SiN-on-Si photonic platforms, as well as our ongoing research in integrated neurophotonics. The research program will be transformative for the field of photonics and computing. It will take Si photonics into an application domain with widespread commercial potential that has not traditionally used integrated photonics. It will enable a new type of computer that augments human cognition in a much more integrative way than today's mobile devices. The research program will benefit Canada by stimulating innovation and by training graduate students in technical and transferable skills.

过去十年见证了硅（SI）光子学的急剧成熟，一种技术，它使用完整的金属氧化物半导体电子产品的制造基础架构在SI底物上形成光子微/纳米尺度设备和光子集成电路。大型SI基板（通常为8英寸或12英寸的直径）和晶圆尺度的微电子包装导致高产量量，可能会降低电光模块的成本。目前，已经为短波红外波长范围（接近1.3或1.5 um）开发了SI光子技术，包括集成波导平台，微加工流，集成设备和微系统。 拟议的研究计划将重新定义SI集成光子学以外的传统形式，以解决可见波长范围内的新应用（约450-650 nm）。特别是，我们将研究可见的光光子集成电路（vispics），用于用于混合现实（MR）耳机的微型三维（3D）头部安装显示器（HMD）。 HMD先生是可穿戴计算机的新兴形式，试图创建沉浸式和直观的人类计算机界面。但是，今天的HMD先生是笨重且非人工经济学的，从而阻止了其宽度的采用。 HMD先生可以提供的经验和经验的表现受到当今的展示技术的很大限制。需要一种更加紧凑，轻巧和明亮的HMD的截然不同的方法，需要具有广角和较大的焦点。 为了应对这一挑战，我们将在SI上开发一个多层可见光光子平台，以实现新颖的光学相阵列梁扫描仪，以供近眼扫描的像素显示器。光子平台将包含氮化硅（SIN）中的几个现代折射率对比度层和氧硝酸硅（Sion），其二氧化硅在Si上的硅胶层。 It will be realized on 8” Si substrates in collaboration with a foundry partner. A new 3D architecture for tunable optical phased arrays will be investigated to decrease the array element pitch to suppress radiation side loves. This research will build upon the remarkable success our group has had infrared light multi-layer SiN-on-Si photonic platforms, as well as our ongoing research in integrated neurophotonics. 该研究计划将针对光子学和计算领域具有变革性。它将将Si Photonics进入具有传统上不使用集成光子学的宽度商业潜力的应用领域。它将启用一种新型计算机，该计算机比当今的移动设备更加集成地增强人类认知。该研究计划将通过刺激创新和培训技术和可转移技能的研究生来使加拿大受益。