Advanced CMOS-MEMS RF Devices

先进的 CMOS-MEMS 射频器件

• 批准号: RGPIN-2015-04263
• 负责人: Mansour, Raafat
• 金额: $ 4.23万
• 依托单位: University of Waterloo
• 依托单位国家: 加拿大
• 项目类别: Discovery Grants Program - Individual
• 财政年份: 2020
• 资助国家: 加拿大
• 起止时间: 2020-01-01 至 2021-12-31
• 项目状态: 已结题
• 来源: https://www.nserc-crsng.gc.ca/ase-oro/Details-Detailles_eng.asp?id=707976
• 关键词: Advanced; CMOS; MEMS; RF; Devices

The proposed research program addresses the integration of Micro-Electro-Mechanical systems (MEMS) with the Complementary Metal Oxide Semiconductor (CMOS) technology to introduce a new class of radio frequencies (RF) devices and instrumentation. The approach leverages the myriad of economic benefits of integrated miniaturized systems with dual electrical and mechanical functionality. Scanning Probe Microscopy (SPM) is used to image material surfaces for the purpose of understanding their molecular structure. Over the past two decades, several forms of SPM have been introduced for imaging and measuring the electric and magnetic properties of surfaces at the nano-scale including the Scanning Tunneling Microscope (STM), the Atomic Force Microscope (AFM) and the Scanning Microwave Microscope (SMM). In particular, the SMM has emerged as an essential tool for mapping material physical properties, such as conductivity and dielectric permittivity. Commercial Scanning Microwave Microscopes are bulky and very expensive. The use of CMOS-MEMS technology allows the realization of highly miniature low cost SMMs. The focus of the proposed research program is to develop CMOS-MEMS chip-scale scanning microwave microscopes capable of operating both in the reflection and transmission modes, which will allow the imaging of both surfaces and sub-surfaces at the nano-scale. The research program also explores the use of new concepts for position sensing and the development of high Q mechanical resonators for enhancing resolution and imaging speeds. The anticipated outcome is to produce chip-scale devices that have a comparable resolution to state-of-the-art instruments, but at an unprecedented fraction of the cost. This research program will contribute to the training of students at the Masters and PhD levels, providing the skills to compete globally in the fields of MEMS and nanotechnology engineering as new applications emerge over the next 5 to 10 years. Graduates trained on the requested infrastructure will be able to transfer their knowledge to Canadian industry, assist companies in recognizing the impact of this research, and acquire the knowledge to be future industry leaders in this expanding technology area. .

拟议的研究计划介绍了微电动机械系统（MEMS）与互补金属氧化物半导体（CMOS）技术的整合，以引入新的无线电频率（RF）设备和仪器。该方法利用了具有双电气和机械功能的综合微型化系统的无数经济利益。 扫描探针显微镜（SPM）用于图像材料表面，以了解其分子结构。在过去的二十年中，已经引入了几种形式的SPM，用于成像和测量纳米尺度表面的电和磁性，包括扫描隧道显微镜（STM），原子力显微镜（AFM）和扫描显微镜显微镜（SMM）。 特别是，SMM已成为绘制材料物理特性（例如电导率和介电介电常数）的重要工具。商业扫描微波显微镜笨重且非常昂贵。 CMOS-MEMS技术的使用允许实现高度微型低成本的SMM。 拟议的研究计划的重点是开发CMOS-MEMS芯片尺度扫描微波显微镜，能够在反射和传输模式下同时运行，这将允许在纳米尺度上对表面和子表面进行成像。该研究计划还探讨了新概念在位置传感以及高Q机械谐振器的开发中，以提高分辨率和成像速度。预期的结果是生产芯片尺度设备，这些设备与最先进的工具具有可比的分辨率，但以前所未有的成本分数。 该研究计划将有助于对硕士和博士学位级别的学生培训，从而提供在MEMS和纳米技术工程领域全球竞争的技能，随着未来5至10年的新应用程序出现。接受了要求的基础设施培训的毕业生将能够将知识转移到加拿大行业，帮助公司认识这项研究的影响，并获得知识，成为这个不断扩展的技术领域的未来行业领导者。 。