Advanced CMOS-MEMS RF Devices

先进的 CMOS-MEMS 射频器件

• 批准号: RGPIN-2015-04263
• 负责人: Mansour, Raafat
• 金额: $ 4.23万
• 依托单位: University of Waterloo
• 依托单位国家: 加拿大
• 项目类别: Discovery Grants Program - Individual
• 财政年份: 2017
• 资助国家: 加拿大
• 起止时间: 2017-01-01 至 2018-12-31
• 项目状态: 已结题
• 来源: https://www.nserc-crsng.gc.ca/ase-oro/Details-Detailles_eng.asp?id=637608
• 关键词: Advanced; CMOS; MEMS; RF; Devices

The proposed research program addresses the integration of Micro-Electro-Mechanical systems (MEMS) with the Complementary Metal Oxide Semiconductor (CMOS) technology to introduce a new class of radio frequencies (RF) devices and instrumentation. The approach leverages the myriad of economic benefits of integrated miniaturized systems with dual electrical and mechanical functionality.

拟议的研究计划致力于将微机电系统 (MEMS) 与互补金属氧化物半导体 (CMOS) 技术集成，以引入新型射频 (RF) 设备和仪器。该方法利用了具有双重电气和机械功能的集成小型化系统的无数经济效益。