Reducing ultrafast laser induced damage in commercial materials during machining of site-specific**targets

减少特定地点**目标加工过程中超快激光对商业材料造成的损伤

• 批准号: 522333-2018
• 负责人: Weck, Arnaud
• 金额: $ 1.82万
• 依托单位: University of Ottawa
• 依托单位国家: 加拿大
• 项目类别: Engage Grants Program
• 财政年份: 2018
• 资助国家: 加拿大
• 起止时间: 2018-01-01 至 2019-12-31
• 项目状态: 已结题
• 来源: https://www.nserc-crsng.gc.ca/ase-oro/Details-Detailles_eng.asp?id=668318
• 关键词: Reducing; ultrafast; laser; induced; damage

Fibics Incorporated was established in early 1997 with the goal of developing applications of Focused Ion Beam (FIB) microscopy**in the fields of Metallurgy and Materials Science. Since then, Fibics has become a world authority on focused ion beams and**associated ion-solid interactions, FIB, and Scanning Electron Microscopy (SEM) applications. Focused Ion Beam (FIB) microscopy**can be considered a near-atomic-scale milling machines, capable of precise and rapid removal of material in a near-stress-free**manner using ballistic milling of ions. FIB systems work well to remove very small amounts of material, on the order of one to one**million cubic micrometers. Beyond this, it is necessary to pre-prepare the sample in some way, which typically includes**mechanical grinding or polishing, which usually result in unwanted damage to the material. Typical times to micromachine a**sample can range from a few hours to a whole day. Fibics, in collaboration with the University of Ottawa, will investigate the**potential of using ultrafast lasers to decrease the micromachining times by orders of magnitude in Fibics sample preparation**processes. Ultrafast lasers are known to have high material removal rates with minimal collateral damage to the surrounding**material (i.e. heat affected zone, defect formation, etc.). Various samples will be machined with the ultrafast laser at the University**of Ottawa and characterized for damage at Fibics. The results obtained at the end of the project will allow Fibics to assess whether**this ultrafast laser technology would be a viable asset in the context of Fibics activities.

Fibics Incorporated 成立于 1997 年初，目标是开发聚焦离子束 (FIB) 显微镜**在冶金和材料科学领域的应用。从那时起，Fibics 已成为聚焦离子束和**相关离子-固体相互作用、FIB 和扫描电子显微镜 (SEM) 应用领域的世界权威。聚焦离子束 (FIB) 显微镜**可被视为近原子级铣床，能够使用离子弹道铣削以近乎无应力**的方式精确、快速地去除材料。 FIB 系统可以很好地去除极少量的材料，数量级为一百万立方微米到一百万立方微米。除此之外，还需要以某种方式预先准备样品，通常包括**机械研磨或抛光，这通常会对材料造成不必要的损坏。对样品进行微加工的典型时间可以从几个小时到一整天不等。 Fibics 与渥太华大学合作，将研究使用超快激光器在 Fibics 样品制备**过程中将微加工时间减少几个数量级的潜力。众所周知，超快激光器具有较高的材料去除率，并且对周围**材料（即热影响区、缺陷形成等）的附带损害最小。渥太华大学**将使用超快激光加工各种样品，并在 Fibics 进行损伤表征。项目结束时获得的结果将允许 Fibics 评估**这种超快激光技术是否是 Fibics 活动背景下的可行资产。