Vacuum polyradical deposition (VPRD) techniques for specialty nanoelectronics

用于特种纳米电子学的真空多自由基沉积 (VPRD) 技术

• 批准号: 506356-2017
• 负责人: Fanchini, Giovanni
• 金额: $ 17.52万
• 依托单位: University of Western Ontario
• 依托单位国家: 加拿大
• 项目类别: Strategic Projects - Group
• 财政年份: 2018
• 资助国家: 加拿大
• 起止时间: 2018-01-01 至 2019-12-31
• 项目状态: 已结题
• 来源: https://www.nserc-crsng.gc.ca/ase-oro/Details-Detailles_eng.asp?id=650441
• 关键词: Vacuum; polyradical; deposition; VPRD; techniques; Vacuum; polyradical; deposition; VPRD; techniques

The Canadian plastics and polymer manufacturing sector is in need of a rejuvenation, while Canada's**information and communication technology (ICT) manufacturing is booming. Our 'big' data society and the**progress of ICT generate a continuous demand for new manufacturing solutions that, at the required levels of**thinness, simplicity, and costs, are not currently available from silicon electronics, and 'plastic' electronics**based on organic polymers have often been suggested as promising alternative. This has created a pressing**need for the development of advanced, environmentally-friendly manufacturing methods for the production of**electronic-grade 'plastic' materials. Polyradicals, polymers in which each repeated unit supports an unpaired**electron, are at the forefront of research in 'flash' memories, data storage units capable to retain information**without any external power source, but are writable an unlimited number of times. This proposal capitalizes on**the recent record achievement of the Fanchini-Gilroy team that has demonstrated and patented ultrathin flash**memory devices from a newly designed polyradical, poly[1,5-diisopropyl-3-(cis-5-norbornene**-exo-2,3-dicarboxiimide)-6-oxo-verdazyl] (P6OV), with the thinnest active layer (10 nm) ever obtained, much**thinner than their commercial silicon counterparts. To capitalize on this startling discovery, an industrially**scalable system with the potential to lead to integrated electronics from organic polyradicals must be**implemented. In partnership with Plasmionique, Canada's largest producer of vacuum polymer deposition**systems for electronics , the Fanchini-Gilroy team will develop the prototype of a new vacuum polyradical**deposition (VPRD) reactor that will be commercialized by our industrial partner, enabling solvent-free and**environmentally-friendly mass production of polyradicals, with strong benefits to Canada. A prototype of a**flash memory integrating a large number of memory components onto a single chip will also be demonstrated**with the new VPRD fabrication system, which will feature device patterning technology developed at the**Western University Nanofabrication Facility.**************************************************************************************************************************************

加拿大的塑料和聚合物制造业需要复兴，而加拿大的**信息和通信技术（ICT）制造业蓬勃发展。我们的“大”数据社会和ICT的**进展产生了对新制造解决方案的持续需求，这些解决方案在所需的**薄，简单和成本的水平下，硅电子设备目前尚不可用，而基于有机聚合物的“塑料”电子**通常被认为是有希望的替代方案。这为开发高级，环保制造方法的开发创造了压力**，以生产**电子级“塑料”材料。每个重复单位支持一个未配对的**电子的聚合物，在“闪光”记忆中的研究最前沿，能够保留信息的数据存储单元**没有任何外部电源，但是无限的次数。该提案大写了。 nm）曾经获得过，比其商业硅的较薄。为了利用这一令人震惊的发现，必须实施一个具有工业**的可扩展系统，该系统有可能导致来自有机多层的综合电子产品。 Flasmionique是加拿大最大的真空聚合物沉积**电子产品系统的生产商，Fanchini-Gilroy团队将开发一个新的真空多自由基**沉积物（VPRD）反应堆的原型，该反应堆将由我们的工业合作伙伴商业化，从而使综合型和**友好的群体友好地构成了加拿大的友好型群体。 **闪存的原型也将与新的VPRD制造系统一起展示，将大量内存组件集成到单个芯片上，该系统将采用**西方大学纳米制动器开发的设备图案技术 设施。**************************************************************************************************************************************