Vacuum polyradical deposition (VPRD) techniques for specialty nanoelectronics

用于特种纳米电子学的真空多自由基沉积 (VPRD) 技术

• 批准号: 506356-2017
• 负责人: Fanchini, Giovanni
• 金额: $ 12.57万
• 依托单位: University of Western Ontario
• 依托单位国家: 加拿大
• 项目类别: Strategic Projects - Group
• 财政年份: 2019
• 资助国家: 加拿大
• 起止时间: 2019-01-01 至 2020-12-31
• 项目状态: 已结题
• 来源: https://www.nserc-crsng.gc.ca/ase-oro/Details-Detailles_eng.asp?id=693986
• 关键词: Vacuum; polyradical; deposition; VPRD; techniques

The Canadian plastics and polymer manufacturing sector is in need of a rejuvenation, while Canada'sinformation and communication technology (ICT) manufacturing is booming. Our 'big' data society and theprogress of ICT generate a continuous demand for new manufacturing solutions that, at the required levels ofthinness, simplicity, and costs, are not currently available from silicon electronics, and 'plastic' electronicsbased on organic polymers have often been suggested as promising alternative. This has created a pressingneed for the development of advanced, environmentally-friendly manufacturing methods for the production ofelectronic-grade 'plastic' materials. Polyradicals, polymers in which each repeated unit supports an unpairedelectron, are at the forefront of research in 'flash' memories, data storage units capable to retain informationwithout any external power source, but are writable an unlimited number of times. This proposal capitalizes onthe recent record achievement of the Fanchini-Gilroy team that has demonstrated and patented ultrathin flashmemory devices from a newly designed polyradical, poly[1,5-diisopropyl-3-(cis-5-norbornene-exo-2,3-dicarboxiimide)-6-oxo-verdazyl] (P6OV), with the thinnest active layer (10 nm) ever obtained, muchthinner than their commercial silicon counterparts. To capitalize on this startling discovery, an industriallyscalable system with the potential to lead to integrated electronics from organic polyradicals must beimplemented. In partnership with Plasmionique, Canada's largest producer of vacuum polymer depositionsystems for electronics , the Fanchini-Gilroy team will develop the prototype of a new vacuum polyradicaldeposition (VPRD) reactor that will be commercialized by our industrial partner, enabling solvent-free andenvironmentally-friendly mass production of polyradicals, with strong benefits to Canada. A prototype of aflash memory integrating a large number of memory components onto a single chip will also be demonstratedwith the new VPRD fabrication system, which will feature device patterning technology developed at theWestern University Nanofabrication Facility.

加拿大塑料和聚合物制造业需要复兴，而加拿大的信息和通信技术（ICT）制造业蓬勃发展。我们的“大型”数据社会和ICT的发展产生了对新制造解决方案的持续需求，这些解决方案在所需的薄层，简单性和成本的水平上，硅电子设备目前尚不可用，而基于有机聚合物的“塑料”电子设备通常被认为是有希望的选择。这为开发高级，环保制造方法的开发创造了一个压制，用于生产电子级“塑料”材料。每个重复单元支持不属于的聚合物的聚合物，在“闪存”记忆中是研究的最前沿，能够在没有任何外部电源源的情况下保留Information的数据存储单元，但可写无限的次数。 This proposal capitalizes onthe recent record achievement of the Fanchini-Gilroy team that has demonstrated and patented ultrathin flashmemory devices from a newly designed polyradical, poly[1,5-diisopropyl-3-(cis-5-norbornene-exo-2,3-dicarboxiimide)-6-oxo-verdazyl] (P6OV), with the thinnest active layer (10 nm) ever获得的，比其商业硅对应物。为了利用这一令人震惊的发现，必须实现有机多发式综合电子的工业规模系统。 Flasmionique是加拿大最大的电子真空聚合物沉积系统生产国，Fanchini-Gilroy团队将开发新的真空吸尘器沉积物（VPRD）反应堆的原型，该反应堆将由我们的工业合作伙伴商业化，从而实现强大的环境效果，并与加拿大友好地友好地制作。 Aflash存储器的原型将在新的VPRD制造系统中展示，将大量存储器组合到单个芯片上，该系统将采用Western University NanoFabrication Facility开发的设备图案技术。