Vacuum polyradical deposition (VPRD) techniques for specialty nanoelectronics

用于特种纳米电子学的真空多自由基沉积 (VPRD) 技术

• 批准号: 506356-2017
• 负责人: Fanchini, Giovanni
• 金额: $ 12.57万
• 依托单位: University of Western Ontario
• 依托单位国家: 加拿大
• 项目类别: Strategic Projects - Group
• 财政年份: 2019
• 资助国家: 加拿大
• 起止时间: 2019-01-01 至 2020-12-31
• 项目状态: 已结题
• 来源: https://www.nserc-crsng.gc.ca/ase-oro/Details-Detailles_eng.asp?id=693986
• 关键词: Vacuum; polyradical; deposition; VPRD; techniques

The Canadian plastics and polymer manufacturing sector is in need of a rejuvenation, while Canada'sinformation and communication technology (ICT) manufacturing is booming. Our 'big' data society and theprogress of ICT generate a continuous demand for new manufacturing solutions that, at the required levels ofthinness, simplicity, and costs, are not currently available from silicon electronics, and 'plastic' electronicsbased on organic polymers have often been suggested as promising alternative. This has created a pressingneed for the development of advanced, environmentally-friendly manufacturing methods for the production ofelectronic-grade 'plastic' materials. Polyradicals, polymers in which each repeated unit supports an unpairedelectron, are at the forefront of research in 'flash' memories, data storage units capable to retain informationwithout any external power source, but are writable an unlimited number of times. This proposal capitalizes onthe recent record achievement of the Fanchini-Gilroy team that has demonstrated and patented ultrathin flashmemory devices from a newly designed polyradical, poly[1,5-diisopropyl-3-(cis-5-norbornene-exo-2,3-dicarboxiimide)-6-oxo-verdazyl] (P6OV), with the thinnest active layer (10 nm) ever obtained, muchthinner than their commercial silicon counterparts. To capitalize on this startling discovery, an industriallyscalable system with the potential to lead to integrated electronics from organic polyradicals must beimplemented. In partnership with Plasmionique, Canada's largest producer of vacuum polymer depositionsystems for electronics , the Fanchini-Gilroy team will develop the prototype of a new vacuum polyradicaldeposition (VPRD) reactor that will be commercialized by our industrial partner, enabling solvent-free andenvironmentally-friendly mass production of polyradicals, with strong benefits to Canada. A prototype of aflash memory integrating a large number of memory components onto a single chip will also be demonstratedwith the new VPRD fabrication system, which will feature device patterning technology developed at theWestern University Nanofabrication Facility.

加拿大塑料和聚合物制造业需要振兴，而加拿大的信息和通信技术（ICT）制造业正在蓬勃发展。我们的“大”数据社会和信息通信技术的进步产生了对新制造解决方案的持续需求，这些解决方案在所需的薄度、简单性和成本水平上目前无法从硅电子产品中获得，而基于有机聚合物的“塑料”电子产品通常已被广泛采用。建议作为有希望的替代方案。这就迫切需要开发先进、环保的制造方法来生产电子级“塑料”材料。多自由基是一种聚合物，其中每个重复单元都支持一个不成对的电子，它处于“闪存”存储器研究的前沿，这种数据存储单元能够在没有任何外部电源的情况下保留信息，但可以无限次写入。该提案利用了 Fanchini-Gilroy 团队最近取得的创纪录成就，该团队已展示并获得了由新设计的多自由基聚[1,5-二异丙基-3-(cis-5-norbornene-exo-2,3-) 超薄闪存器件的专利。 dicarboxiimide)-6-oxo-verdazyl] (P6OV)，具有有史以来最薄的活性层（10 nm），比商业硅薄得多同行。为了利用这一惊人的发现，必须实施一个工业可扩展的系统，该系统有可能从有机多自由基中产生集成电子器件。 Fanchini-Gilroy 团队与加拿大最大的电子真空聚合物沉积系统生产商 Plasmionique 合作，将开发新型真空多自由基沉积 (VPRD) 反应器的原型，该反应器将由我们的工业合作伙伴商业化，从而实现无溶剂且环保的大规模生产生产多自由基，给加拿大带来巨大利益。将大量存储组件集成到单个芯片上的闪存原型也将通过新的 VPRD 制造系统进行展示，该系统将采用西方大学纳米制造设施开发的器件图案技术。