Precursors for the production of yttrium oxide thin films by chemical vapour deposition**

通过化学气相沉积法生产氧化钇薄膜的前体**

• 批准号: 533699-2018
• 负责人: Berg, David
• 金额: $ 1.81万
• 依托单位: University of Victoria
• 依托单位国家: 加拿大
• 项目类别: Engage Grants Program
• 财政年份: 2018
• 资助国家: 加拿大
• 起止时间: 2018-01-01 至 2019-12-31
• 项目状态: 已结题
• 来源: https://www.nserc-crsng.gc.ca/ase-oro/Details-Detailles_eng.asp?id=645226
• 关键词: Precursors; production; yttrium; oxide; thin

Seastar Chemicals produces thin films for the semiconductor industry by chemical vapour deposition (CVD) techniques. Yttrium oxide thin films are of interest in microelectronics applications, for use as photonic waveguides and as durable wear-resistant coatings. Seastar Chemicals intends to extend their thin film fabrication methods to produce yttrium oxide coatings on a wide range of substrates. However, the commercial development of this area is hindered by the lack of suitably volatile and thermally robust molecular precursors. The goal of this project is to develop new ligands that produce yttrium complexes with enhanced volatility but reasonable thermal stability.

Seastar Chemicals 通过化学气相沉积 (CVD) 技术为半导体行业生产薄膜。氧化钇薄膜在微电子应用中很受关注，可用作光子波导和耐用的耐磨涂层。 Seastar Chemicals 打算扩展其薄膜制造方法，在各种基材上生产氧化钇涂层。然而，由于缺乏适当的挥发性和耐热性的分子前体，该领域的商业发展受到阻碍。该项目的目标是开发新的配体，产生具有增强的挥发性但具有合理的热稳定性的钇配合物。