"Integrated LTCC/MEMS Circuits for Small-Size, Light-Weight and Power-Efficient Intelligent RF Front-Ends"

“用于小尺寸、轻重量和高能效智能射频前端的集成 LTCC/MEMS 电路”

• 批准号: 217357-2012
• 负责人: Kouki, Ammar
• 金额: $ 3.06万
• 依托单位: École de technologie supérieure
• 依托单位国家: 加拿大
• 项目类别: Discovery Grants Program - Individual
• 财政年份: 2013
• 资助国家: 加拿大
• 起止时间: 2013-01-01 至 2014-12-31
• 项目状态: 已结题
• 来源: https://www.nserc-crsng.gc.ca/ase-oro/Details-Detailles_eng.asp?id=523772
• 关键词: Integrated; LTCC; MEMS; Circuits; Small

In recent years, École de technolgie supérieure (ÉTS), with support from Economic Development Canada, invested significant amounts of money to build and equip two co-located clean room facilities that house a Low Temperature Cofired Ceramics (LTCC) fabrication process, in one, and a Micro-Electro-Mechanical Systems (MEMS) fabrication process, in the other. The LTCC facility, a first of its kind in Canada, includes a world class industrial grade fabrication chain while the MEMS facility houses state of the art microsystems fabrication equipment. LTCC allows the fabrication of circuits in a 3-dimensional fashion such that circuits can be made smaller and lighter. MEMS on the other hand can make circuits reconfigurable such that one circuit can serve multiple frequencies and multiple standards thus reducing the number or components needed in wireless terminals such as a smart phone. The present proposal aims at carrying out research using these facilities to develop new innovative radiofrequency circuits and devices commonly used in wireless and satellite communications. By combining LTCC and MEMS, we plan to develop new smarter, smaller, lighter weight and more power efficient circuits that can drive down cost while offering more performance. The personnel who will be trained under this program will be called upon to meet this objective by making a number of scientific and technological advancements and by developing a wide range of new skills in the design, fabrication and testing of these new circuits.

近年来，高等技术学院 (ÉTS) 在加拿大经济发展部的支持下，投入大量资金建造和装备了两座位于同一地点的洁净室设施，其中一间设施采用低温共烧陶瓷 (LTCC) 制造工艺。另一个是微机电系统 (MEMS) 制造工艺，LTCC 工厂是加拿大首个此类工厂，拥有世界一流的工业级制造链。 MEMS 设施拥有最先进的微系统制造设备，允许以 3 维方式制造电路，从而可以使电路变得更小、更轻，另一方面，MEMS 可以使电路可重新配置，从而使一个电路可以服务于多个电路。频率和多种标准，从而减少智能手机等无线终端所需的数量或组件。本提案旨在利用这些设施进行研究，以开发无线和卫星通信中常用的新型创新射频电路和设备。 LTCC 和 MEMS，我们计划开发新的更智能、更小、重量更轻和更节能的电路，这些电路可以降低成本，同时提供更高的性能。大量科学和技术进步，以及在这些新电路的设计、制造和测试方面开发广泛的新技能。