Upgrade of metal organic vapor phase epitaxy reactors for thermoelectric and magnetic semiconductor alloys and heterostructures

用于热电和磁性半导体合金和异质结构的金属有机气相外延反应器的升级

• 批准号: 345592-2007
• 负责人: Masut, Remo
• 金额: $ 10.05万
• 依托单位: École Polytechnique de Montréal
• 依托单位国家: 加拿大
• 项目类别: Research Tools and Instruments - Category 1 (<$150,000)
• 财政年份: 2006
• 资助国家: 加拿大
• 起止时间: 2006-01-01 至 2007-12-31
• 项目状态: 已结题
• 来源: https://www.nserc-crsng.gc.ca/ase-oro/Details-Detailles_eng.asp?id=326003
• 关键词: Upgrade; metal; organic; vapor; phase

This equipment proposal requests funds to complete the construction of a metal-organic vapor phase epitaxy reactor (MOVPE) for the growth of magnetic semiconductors alloys (MSA) and low dimensional thermoelectric (TE) structures at the Department of Engineering Physics of the Ecole Polytechnique of Montreal. It also requests funds to replace specialty valves to ensure the adequate operation of both this new and the existing MOVPE reactor which has now more than 17 years of use. For the MSA/TE reactor still under construction we need replacing of the "chemical" vacuum pump at the reactor core, and the electronic and computer control units of the fast switching gas manifold. This control is essential to provide sharp interfaces in device heterostructures. We also need flow meters, a binary concentration gas monitor, and new quartz ware and graphite susceptors.  This MSA/TE reactor, partially built from parts of an old Nortelnetworks reactor donated to our laboratories, has already produced the first GaMnP/GaP(001) films by this technique. The funds we request will help upgrade and complete this reactor by the addition of new organometallic lines, as well as providing essential equipment to continue adequate operation of both reactors at our facilities. These MOVPE systems are part of the central facilities of the Montreal Thin Films Group (GCM) and complement the expertise in materials science, semiconductor device design, fabrication and characterization of many of its members. The new reactor dedicated to MSA/TE, which needs to be completed, introduces magnetic elements such as Mn, or column VI elements, which are contaminants highly incompatible with the projects carried out in the older reactor. Both systems are at the core of a broad program in III-V semiconductor crystal growth for projects on: (1) epitaxy of MSA for fundamental studies on transport in magnetic and semiconducting heterostructures, (2) fundamental studies of materials properties, in particular those which are affected by strain and strain-relaxation, including dilute nitrides and reduced dimensionality structures such as quantum dots and (3) novel electronic, optoelectronic, and thermoelectric device development.

该设备提案要求资金完成磁性半导体合金（MSA）和低维热电（TE）结构的磁性蒸气相位外观反应器（MOVPE）的构建。它还要求资金替换专业阀，以确保该新的和现有的Movpe反应堆的适当操作，该反应堆已有17年以上的历史。对于仍在构造的MSA/TE反应器，我们需要更换反应堆芯的“化学”真空泵，以及快速开关气体歧管的电子和计算机控制单元。该控制对于在设备异质结构中提供尖锐的接口至关重要。我们还需要流量计，二元浓度气体监测仪以及新的石英用品和石墨感应器。这种MSA/TE反应堆部分是由捐赠给我们实验室的旧北奈特沃工作反应堆的部分构建的，已经通过该技术制作了第一部gamnp/gap（001）膜。我们要求的资金将通过添加新的有机产品线来帮助升级和完成此反应堆，并提供必要的设备，以继续在我们的设施中进行足够的两个反应堆运行。这些Movpe系统是蒙特利尔薄膜组（GCM）的中心设施的一部分，并补充了材料科学，半导体设备设计，制造和表征其许多成员的专业知识。需要完成的新型反应器，它引入了磁元素，例如MN或VI列元素，它们与旧反应器中进行的项目高度不相容。这两个系统都是项目的核心，用于项目的III-V半导体晶体增长：（1）MSA的表现：（1）磁性和半导体异质结构中运输基础研究的表现，（2）材料特性的基本研究，尤其是由应变和应变型的稀释型二硝基和还原性降低的（包括稀释型二氮的降压）的基本研究光电子和热电设备开发。