TOXICITY OF CHEMICALS USED IN THE SEMICONDUCTOR INDUSTRY

半导体行业使用的化学品的毒性

• 批准号: 5202103
• 负责人: D L MORGAN
• 金额: --
• 依托单位: NATIONAL INSTITUTE OF ENVIRONMENTAL HEALTH SCIENCES
• 依托单位国家: 美国
• 资助国家: 美国
• 起止时间: 至
• 项目状态: 未结题
• 来源: https://reporter.nih.gov/project-details/5202103
• 关键词: DNA damage; cadmium; copper; cytotoxicity; diagnostic respiratory lavage; environmental toxicology; fibronectins; gallium; histopathology; hydroxyproline; indium; industry; inhalation drug administration; laboratory mouse; laboratory rat; metal poisoning; occupational hazard; phosphines; pulmonary fibrosis /granuloma; respiratory pharmacology; respiratory toxin; selenium; semiconduction; tellurium; toxin metabolism

The objective of these studies is to investigate the absorption, distribution and pulmonary toxicity of several novel chemicals used in the semiconductor and photovoltaic industries. Studies were conducted to evaluate the progression of pulmonary toxicity up to 28 days after administration of copper-indium diselenide (CIS), copper-gallium diselenide (CGS) and cadmium telluride (CdTe). Endpoints included body and organ weights, and histopathology. Bronchoalveolar lavage fluid (BALF) was evaluated for changes in cell differentials, protein, and fibronectin levels. Lung hydroxyproline content was measured as an index of fibrosis. Blood and selected tissues were collected for measurement of Cu, In, Ga, Se, Cd, or Te. Initial results indicate that CdTe was the most toxic, CIS had intermediate toxicity and CGS was the least toxic. For each compound significant chemical-related effects were observed for lung weights and all BALF indices. CdTe was also highly fibrogenic for the lung as indicated by histopathology, fibronectin and hydroxyproline measurements. Metal analyses are still in progress. Additional studies are in progress to determine if CdTe fibrogenic effects resolve after 28 days, and to compare the solubility of the three compounds. Phosphine (PH3) a highly reactive gas used in the semiconductor industry, as well as a fumigant pesticide, was studied because of the potential for increased worker exposure, potential chromosome damage in workers exposed to PH3, and the lack of inhalation toxicity data. Collaboratorive studies with the USEPA were conducted to characterize the systemic and genetic toxicity and dominant lethal effects of PH3. Genetic toxicity, dominant lethal data, histopathology and tissue-bound PH3 levels were essentially negative in rats and mice in this two-week study. The primary effect of Ph3 inhalation was lethality, with no specific target organ toxicity.

这些研究的目的是研究吸收， 几种新型化学物质的分布和肺毒性 半导体和光伏产业。 进行了研究 评估长达28天的肺毒性的进展 给药铜 - 印度铜（CIS），铜制铜。 去苷（CGS）和牙加嘌呤（CDTE）。 终点包括身体 和器官的重量和组织病理学。 支气管肺泡灌洗液 （BALF）评估细胞差异，蛋白质和 纤连蛋白水平。 测量肺羟基含量作为指数 纤维化。 收集血液和选定的组织进行测量 cu，in，ga，se，cd或te。 初始结果表明CDTE是 CIS大多数有毒的毒性中间毒性，CGS毒性最少。 对于每种化合物，观察到明显的化学相关作用 肺重量和所有BALF指数。 CDTE也具有高度的纤维化 肺部病理学，纤连蛋白和羟基普罗林表明的肺 测量。 金属分析仍在进行中。 其他研究 正在进行中以确定28后CDTE纤维化效应是否解决 几天，并比较三种化合物的溶解度。 磷酸（PH3）在半导体行业中使用的高反应性气体， 除了熏蒸的农药，还研究了 工人接触增加，工人暴露的潜在染色体损害 到PH3，缺乏吸入毒性数据。合作研究 进行USEPA的进行以表征全身和遗传 PH3的毒性和主要的致命作用。遗传毒性，主导 致命数据，组织病理学和组织结合的PH3水平本质上是 在这项为期两周的研究中，大鼠和小鼠的阴性。主要效果 PH3吸入为致死性，没有特定的靶器官毒性。