Underpinning Equipment Enhancing Semiconductor Characterisation Capabilities in the EPSRC National Epitaxy Facility

支撑设备增强 EPSRC 国家外延设施的半导体表征能力

• 批准号: EP/V036203/1
• 负责人: Jon Heffernan
• 金额: $ 48.57万
• 依托单位: University of Sheffield
• 依托单位国家: 英国
• 项目类别: Research Grant
• 财政年份: 2020
• 资助国家: 英国
• 起止时间: 2020 至 无数据
• 项目状态: 已结题
• 来源: https://gtr.ukri.org/projects?ref=EP%2FV036203%2F1
• 关键词: Underpinning; Equipment; Enhancing; Semiconductor; Characterisation

The National Epitaxy Facility requires three pieces of equipment to upgrade its scientific capabilities and to improve the efficiency of the facility in meeting user needs.The facility will install:1. An automated Hall effect measurement system with 3-300K variable temperature capability and variable magnetic field capability of up to 2.5T. This will significantly enhance the use of Hall effect measurements in the facility for developing new materials and for monitoring material quality trends to the benefit of all users.2. A Nomarski inspection microscope used to screen all wafers in the facility for surface defects, which is a strong marker of material quality. The microscope will be fully automated and can cater for wafers sizes up to 200mm in diameter3. A Reflection High Energy Electron Diffraction (RHEED) gun to be added to the facility's MBE cluster system. This MBE system is designed for the scale up of quantum dot technologies for applications in Quantum Computing, Quantum Communications and Quantum Imaging. The RHEED system will be a vital part of the development process for high quality semiconductor quantum dots and will be used for real-time monitoring of surface quality during epitaxial growth and in the cleaning of wafers.

国家外延设施需要三台设备来升级其科学能力并提高设施满足用户需求的效率。该设施将安装：1。自动化霍尔效应测量系统，具有 3-300K 可变温度能力和高达 2.5T 的可变磁场能力。这将显着增强霍尔效应测量在新材料开发和材料质量趋势监测设施中的使用，从而造福所有用户。2．诺玛斯基检查显微镜用于筛查设备中所有晶圆的表面缺陷，这是材料质量的有力标志。该显微镜将是全自动的，可满足直径最大 200 毫米的晶圆尺寸3。反射高能电子衍射 (RHEED) 枪将添加到该设施的 MBE 集群系统中。该 MBE 系统专为扩大量子点技术在量子计算、量子通信和量子成像领域的应用而设计。 RHEED系统将成为高质量半导体量子点开发过程的重要组成部分，并将用于外延生长和晶圆清洗过程中表面质量的实时监控。