CORNERSTONE: Capability for OptoelectRoNics, mEtamateRialS, nanoTechnOlogy aNd sEnsing

基石：光电、超材料、纳米技术和传感能力

• 批准号: EP/L021129/1
• 负责人: Graham Reed
• 金额: $ 288.88万
• 依托单位: University of Southampton
• 依托单位国家: 英国
• 项目类别: Research Grant
• 财政年份: 2014
• 资助国家: 英国
• 起止时间: 2014 至 无数据
• 项目状态: 已结题
• 来源: https://gtr.ukri.org/projects?ref=EP%2FL021129%2F1
• 关键词: CORNERSTONE; Capability; OptoelectRoNics; mEtamateRialS; nanoTechnOlogy

This proposal seeks funding to acquire a stepper and associated wafer coater, tools to enable photolithographic patterning of semiconductor wafers for device and circuit fabrication. The stepper will be located at Southampton University in the recent £120m cleanroom complex. It will relieve the bottleneck within the cleanroom, an electron beam lithography tool, which is a slower alternative patterning tool. This will increase capacity within the cleanroom complex and facilitate and underpin a wealth of world class research. Not only will research at Southampton be enhanced, but Southampton (SOU), Glasgow (GLA), and Surrey (SUR) universities will pool resources to establish a Silicon Photonics Fabrication Capability within the UK, to facilitate an increasing demand for the fabrication of Silicon Photonics devices from the UK's premier researchers. This will encourage wider usage of world class equipment within the UK, in line with EPSRC policy. We seek funding for both the equipment and 3.5 RAs across the 3 institutions, over a 4 year period, to establish and deliver the Capability. Access to a very significant inventory of additional equipment at these 3 universities will be facilitated. The Capability is extremely timely, as silicon foundry services around the world are moving towards a model in which standard platforms and devices will be offered, making it more difficult for researchers to carry out innovative work at the device level, or in non-standard platforms.The proposal is supported by 36 members of academic staff at Southampton, with a total current research portfolio of projects valued in excess of £88m. Furthermore we have 10 project partners who will take part in the use and assessment of the silicon photonics capability by designing and subsequently testing fabricated devices. Their total in-kind contribution is valued at £793,300. These partners have expressed an interest in using the capability after the project has been completed. In addition we have contacted a few example potential users from within the industrial sector (SMEs), and from around the world who have also provided letters of support indicating that they would use the capability after the project is complete. Taking this net proposed usage, it is clear that the equipment will be sustained beyond the period of the funded project. The Southampton users alone need only generate a tiny fraction (0.2%) of their research portfolio to cover running costs and depreciation. Consumables will increase with usage, but clearly, the silicon photonics capability will generate paying users, to further sustain the capability beyond the project, which will, in turn, allow UK researchers to compete effectively on the world stage in the buoyant field of silicon photonics. Beyond the 4 year project, the Silicon Photonics Capability will be operated by the commercial arms of the 3 partner universities, all of whom have provided letters of support confirming their ongoing participation.

该提案寻求资金以获取步进和相关的摇动座椅，以实现用于设备和电路制造的半导体波的光刻图案的工具。步进器将位于最近的1.2亿英镑清洁室综合体中，位于南安普敦大学。它将在洁净室内营救瓶颈，这是一种电子束光刻工具，这是一种较慢的替代图案工具。这将增加洁净室综合体内的能力，并促进和支持大量世界一流的研究。不仅可以增强在南安普敦的研究，而且还将得到南安普敦（SOU），格拉斯哥（GLA）和萨里（Surrey）（SUR）（SUR）大学的资源来建立英国境内的硅光子学制造能力，以促进对英国首屈一指的Premier Premier Researchers制造硅光子器件的日益增长的需求。与EPSRC政策一致，这将鼓励英国境内更广泛使用世界一流的设备。在4年内，我们在3个机构中为设备和3.5 RA寻求资金，以建立和交付能力。将准备这三所大学的其他设备的非常重要的库存。该功能非常及时，因为全球硅铸造厂正在朝着一个模型迈进，在该模型中将提供标准平台和设备，这使得研究人员更难在设备级别或非标准平台上进行创新的工作。该提案由SouthAmpton的36名学术人员提供支持，并在当前的研究库中提供了总计，该项目的总收入为88mm $ 88mm $ 88M。此外，我们有10个项目合作伙伴，他们将通过设计和随后测试制造的设备来参与硅光子学功能的使用和评估。他们的总捐款价值为793,300英镑。这些合作伙伴表示有兴趣在项目完成后使用该功能。此外，我们已经与工业领域（中小型企业）以及来自世界各地的一些潜在用户联系，他们还提供了支持信，表明他们将在项目完成后使用该功能。拿出该净拟议的用法，很明显，设备将在资助项目的时期内维持。仅南安普敦的用户仅需要产生其研究组合的一小部分（0.2％）即可支付运行成本和折旧。消耗品将随着使用情况而增加，但很明显，硅光子学能力将产生付费用户，以进一步维持超出项目的能力，这将允许英国研究人员在硅光子学领域的世界舞台上有效竞争。除了4年项目外，硅光子学能力还将由三所合作伙伴大学的商业武器运营，所有这些大学都提供了证实他们持续参与的支持信。

项目成果

Low propagation loss Ge-on-Si waveguides and their dependency on processing methods

低传播损耗硅基锗波导及其对加工方法的依赖性

• DOI: 10.1109/cleopr.2017.8118738
• 发表时间: 2017
• 作者: Anantha P

Low-Temperature NH3-Free Silicon Nitride Platforms for Integrated Photonics

用于集成光子学的低温无 NH3 氮化硅平台

• DOI: 10.1109/group4.2018.8478748
• 发表时间: 2018
• 作者: Bucio T

High Speed Silicon Capacitor Modulators for TM Polarisation

用于 TM 偏振的高速硅电容调制器

• DOI: 10.1109/group4.2019.8853906
• 发表时间: 2019
• 作者: Banakar M

Compact, Ultra-Tunable InGaSb/AlGaAsSb Si External Cavity Laser at the Mid-Infrared (MIR)

• DOI: 10.23919/cleo.2019.8749759
• 发表时间: 2019-05
• 期刊: 2019 Conference on Lasers and Electro-Optics (CLEO)
• 作者: Jia Xu Brian Sia;Wanjun Wang;Z. Qiao;Xiang Li;Xin Guo;Jin Zhou;Zecen Zhang;C. Littlejohns;Chongyang Liu;G. Reed;Hong Wang

N-rich silicon nitride angled MMI for coarse wavelength division (de)multiplexing in the O-band

• DOI: 10.1364/ol.43.001251
• 发表时间: 2018-03-15
• 期刊: OPTICS LETTERS
• 影响因子: 3.6
• 作者: Bucio, Thalia Dominguez;Khokhar, Ali Z.;Gardes, Frederic Y.
• 通讯作者: Gardes, Frederic Y.